In this study, a MEMS tactile sensor was designed and fabricated, with the aim of achieving integrated measurement of object contact, thermal, and proximity sensation. This sensor integrates a Si photoresistor for light detection, a microcantilever with a NiCr strain gauge for force detection, and an Au resistance thermometer detector with a heater for temperature detection. Furthermore, since both the strain gauge and the photoresistor exhibit temperature dependency, temperature compensation was applied to the measured data. Thus, it was demonstrated that a single sensor can dynamically and simultaneously measure different modalities: object contact force, thermal, and proximity sensation. Sensors equipped with both tactile and proximity capabilities are expected to enable accurate manipulation and control of grasping force.

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