Concept of a Focus-Tunable ECF Microlens and Fabrication of a Large Model Prototype
Joon-Wan Kim*, Takashi Yoshimoto*, Shinichi Yokota*,
and Kazuya Edamura**
*Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
**New Technology Management Co. Ltd., 2-9-1-306 Higashi-Shinkoiwa, Katsushika-ku, Tokyo 124-0023, Japan
This paper proposes a novel elastomer-based tunable liquid-filled microlens by using an Electro-Conjugate Fluid (ECF) jet and MEMS technology. The common approach for tuning an elastomer-based microlens is to change the geometry of the boundary determined by the control pressure of the chamber by using an external pump. However, this paper proposes placing the ECF micropump inside the tunable microlens. The ECF is a dielectric fluid that works as a smart fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. Since the ECF jet is generated only with a pair of tiny electrodes, the pumping mechanism can be easily inside the device. We fabricated the large model prototype of an ECF focus-tunable microlens by partially utilizing MEMS technology. The experimental results showed us the feasibility of the ECF microlens.
and Kazuya Edamura, “Concept of a Focus-Tunable ECF Microlens and Fabrication of a Large Model Prototype,” Int. J. Automation Technol., Vol.6, No.4, pp. 476-481, 2012.
-  D. Psaltis, S. R. Quake, and C. Yang, “Developing optofluidic technology through the fusion of microfluidics and optics,” Nature, Vol.442, pp. 381-386, 2006.
-  C. Monat, P. Domachuk, and B. J. Eggleton, “Integrated optofluidics: A new river of light,” Nature Photonics, Vol.1, pp. 106-114, 2007.
-  E. C. Tam, “Smart electro-optical zoom lens,” Optics Letters, Vol.17, pp. 369-372, 1992.
-  H. Ren, Y.-H. Fan, S. Gauza, and S.-T. Wua, “Tunable-focus flat liquid crystal spherical lens,” Applied Physics Letters, Vol.84, pp. 4789-4791, 2004.
-  P.M.Moran, S. Dharmatilleke, A. H. Khaw, and K.W. Tan, “Fluidic lenses with variable focal length,” Applied Physics Letters, Vol.88, p. 041120, 2006.
-  W. H. Hsieh and J. H. Chen, “Lens-Proflie control by electrowetting fabrication technique,” IEEE Photonics Technology Letters, Vol.17, pp. 606-608, 2005.
-  W.-S. Seo, K. Yoshida, S. Yokota, and K. Edamura, “A high performance planar pump using electro-conjugate fluid with improved electrode patterns,” Sensors and Actuators A, Vol.134, pp. 606-614, 2007.
-  R. Abe, K. Takemura, K. Edamura, and S. Yokota, “Concept of a micro finger using electro-conjugate fluid and fabrication of a large model prototype,” Sensors and Actuators A, Vol.136, pp. 629-637, 2007.
-  J.-W. Kim, T. Suzuki, S. Yokota, and K. Edamura, “Tube-type micropump by using electro-conjugated fluid (ECF),” Sensors and Actuators A, Vol.174, pp. 155-161, 2012.
-  M. Liu, J. Sun, Y. Sun, C. Bock, and Q. Chen, “Thicknessdependent mechanical properties of polydimethylsiloxane membranes,” J. OF Micromechanics and Microengineering, Vol.19, p. 035028, 2009.
-  D. A. Chang-Yen, R. K. Eich, and B. K. Gale, “A Monolithic PDMSWaveguide System Fabricated Using Soft-Lithography Techniques,” J. of Lightwave Technology, Vol.23, pp. 2088-2093, 2005.