Study of a Precision Pneumatic Positioning Device Using PZT Dither
Yung-Tien Liu*, Kuo-Ming Chang**, and Huang-Ren Lee*
*Department of Mechanical and Automation Engineering, National Kaohsiung, First University of Science and Technology, 2 Jhuoyue Rd., Nanzih, Kaohsiung 811, Taiwan, R.O.C.
**Department of Mechanical Engineering, National Kaohsiung, University of Applied Sciences, 415 Chien Kung Rd., Sanmin, Kaohsiung 807, Taiwan, R.O.C.
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