Disposable Inkjet Mechanism for Microdroplet Dispensing
Takehito Mizunuma*, Yoko Yamanishi**, Shinya Sakuma*, Hisataka Maruyama*, and Fumihito Arai*
*Department of Bioengineering and Robotics, Tohoku University, 6-6-01 Aramaki-Aoba, Aoba-ku, Sendai 980-8579, Japan
**PRESTO, Japan Science and Technology Agency (JST), 6-6-01 Aramaki-Aoba, Aoba-ku, Sendai 980-8579, Japan
We succeeded in dispensing microdroplets using a disposable inkjet. The novelty of our device lies in the following points: (1) We used a glass-plate-bonded polydimethylsiloxane (PDMS) membrane to fabricate a leaf spring whose spring coefficient is 14 times higher than that of conventional PDMS membranes. This enabled droplets to be dispensed continuously up to 10 Hz when the membrane vibrated through the use of a multilayer piezoelectric actuator attached to the disposable PDMS chip. (2) The nozzle for droplet dispensing was fabricated from thick photoresist (SU-8) to obtain a hydrophobic surface preventing the production of undesired satellite droplets, yielding a droplet dispensing accuracy of ±16.2 µm. Droplets produced by the disposable nozzle, which was 100 µm in diameter, ranged from 95-105 µm at an applied voltage of 105 V.
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