Production and Application of High-Accuracy Polymer-Based  Magnetically Driven Microtool

Yoko Yamanishi; Shinya Sakuma; Fumihito Arai

doi:10.20965/jrm.2008.p0273

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JRM Vol.20 No.2 pp. 273-279

doi: 10.20965/jrm.2008.p0273

(2008)

Paper:

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Production and Application of High-Accuracy Polymer-Based Magnetically Driven Microtool

Yoko Yamanishi, Shinya Sakuma, and Fumihito Arai

Department of Bioengineering and Robotics, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan

Received:

September 30, 2007

Accepted:

December 29, 2007

Published:

April 20, 2008

Keywords:

MEMS, biochip, μ-TAS, magnetically-driven actuation

Abstract

We discuss a novel magnetically driven polymeric microtool for non-intrusive and non-contaminating experiments on a chip. The composite is formed by suspending magnetite particles (Fe₃O₄) in polydimethylsiloxane (PDMS). To obtain precise, complex patterns from magnetically driven microtools, photolithography has been applied taking advantage of thick KMPR-1050 photoresist as a sacrificed mold. The microtool surface was coated to suppress stiction in the biochip. These microtools feature 1. fabrication of any shape, 2. softness (harmless to cells), 3. no stiction, and 4. mass production at low cost enabling disposability. We demonstrate versatile mass-produced magnetically driven microtools such as stirrers and valves. The potential impact of this technology includes sample selection and separation, cell immobilization, mixing and reaction into portable microfluidic labs-on-a-chip, and long-term culture and cell loading.

Cite this article as:

Y. Yamanishi, S. Sakuma, and F. Arai, “Production and Application of High-Accuracy Polymer-Based Magnetically Driven Microtool,” J. Robot. Mechatron., Vol.20 No.2, pp. 273-279, 2008.

Data files:

References

[1] K. W. Oh and C. H. Ahn, “A Review of Microvalves,” Journal of micromechanics and microengineering, 16, R13-R39, 2006.
[2] H. Maruyama, F. Arai, and T. Fukuda, “On-Chip Microparticle Handling Using Magnetically Driven Microdevice,” μ-TAS2005, pp. 1422-1424, 2005.
[3] N. Pamme, “Magnetism and Microfluidics,” Lab on a Chip, 6, pp. 24-38, 2006.
[4] G. Mensing, A. T. M. Pearce, M. D. Graham, and D. J. Beebe, “An Externally Driven Magnetic Microstirrer,” Phil. Trans. R. Soc. Lond. A 362, pp. 1059-1068, 2004.
[5] K. S. Ryu, K. Shaikh, E. Goluch, Z. Fan, and C. Liu, “Micro Magnetic Stir-bar mixer Integrated with Parylene Microfluidic Channel,” Lab on a Chip, 4, pp. 608-613, 2004.
[6] M. Barbic, J. J. Mock, A. P. Gray, and S. Schults, “Electromagnetic Micromotor for Microfluidics Applications,” Applied Physics Letters, 79, 9, pp. 1399-1401, 2001.
[7] Y. C. Lin, Y. Yamanishi, and F. Arai, “On-chip Temperature Sensing and Control for Cell Immobilisation,” 2nd IEEE Int. Conf. on NEMS, pp. 659-663, January, Bankok, Thailand, 2007.
[8] J. J. Nagel, G.Mikhail, H. Noh, and J. Koo, “Magnetically Actuated Micropumps Using an Fe-PDMS Composite Membrane,” Proc. of SPIE, 6172, 1, 617213, pp. 1-9, 2006.
[9] C. Yamahata, C. Lotto, E. M. Al-Assaf, and A. M. Gijs, “A PMMA valveless micropump using electromagnetic actuation,” Microfluid Nanofluid, 1, pp. 197-207, 2005.
[10] A. Hatch, A. E. Kamholz, G. Holman, P. Yager, and K. F. Bohringer, “A ferrofluidic magnetic micropump,” Journal of Microelectromechanical Systems, 10, pp. 215-221, 2001.
[11] W. C. Williams, H. D. Tran, M. J. O’Brien, E. Rabinovich, and G. P. Lopez, “Rapid prototyping of active microfluidic components based on magnetically modified elastomeric materials,” Journal of Vacuum and Science and Technology, B19, 2, pp. 596-599, 2001.
[12] D. Olivier, T. Abdelkrim, D. Yves, G. Leticia, T. Nicolas, P. Phillippe, P. Vladimir, and M. Alain, “Magnetically Actuated Microvalve for Active Flow Control,” Journal of Physics: Conference Series, 34, pp. 631-636, 2006.
[13] C. J. Campbell and B. A. Grzybowski, “Microfluidic Mixers: from Microfabricated to Self-assembling Devices,” Phil. Trans. R. Soc. Lond. A, 362, pp. 1069-1086, 2004.
[14] P. K. Yuen, G. Li, Y. Bao, and U. R. Müller, “Microfluidic Devices for Fluidic Circulation and Mixing Improve Hybridization Signal Intensity on DNA Arrays,” Lab on a Chip, 3, pp. 46-50, 2003.
[15] J. Atencia and D. J. Beebe, “Steady Flow Generation in Microcirculatory Systems,” Lab on a Chip, 6, pp. 567-574, 2006.
[16] Z. Zhang, P. Boccazzi, H.-G. Choi, G. Perozziello, A. J. Sinskey, and K. F. Jensen, “Microchemostat-microbial Continous Cluture in a Polymer-based Instrumentd Microbioreactor,” Lab on a Chip, 6, pp. 906-913, 2006.
[17] K. S. Wilson, J. D. Goff, J. S. Riffle, L. A. Harris, and T. G. St Pierre, “Polydimethylsiloxane-magnetite Nanoparticle Complexes and Dispersions in Polysiloxane Carrier Fluids,” Polyners for Advanced Technologies, 16, pp. 200-211, 2005.
[18] B. J. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-Dimensional Micro-Chanel Fabrication in Polydimethylsiloxane (PDMS) Elastomer,” Journal of Microelectromechanical Systems, 9, 1, pp. 76-81, 2000.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] K. W. Oh and C. H. Ahn, “A Review of Microvalves,” Journal of micromechanics and microengineering, 16, R13-R39, 2006.

[2] [2] H. Maruyama, F. Arai, and T. Fukuda, “On-Chip Microparticle Handling Using Magnetically Driven Microdevice,” μ-TAS2005, pp. 1422-1424, 2005.

[3] [3] N. Pamme, “Magnetism and Microfluidics,” Lab on a Chip, 6, pp. 24-38, 2006.

[4] [4] G. Mensing, A. T. M. Pearce, M. D. Graham, and D. J. Beebe, “An Externally Driven Magnetic Microstirrer,” Phil. Trans. R. Soc. Lond. A 362, pp. 1059-1068, 2004.

[5] [5] K. S. Ryu, K. Shaikh, E. Goluch, Z. Fan, and C. Liu, “Micro Magnetic Stir-bar mixer Integrated with Parylene Microfluidic Channel,” Lab on a Chip, 4, pp. 608-613, 2004.

[6] [6] M. Barbic, J. J. Mock, A. P. Gray, and S. Schults, “Electromagnetic Micromotor for Microfluidics Applications,” Applied Physics Letters, 79, 9, pp. 1399-1401, 2001.

[7] [7] Y. C. Lin, Y. Yamanishi, and F. Arai, “On-chip Temperature Sensing and Control for Cell Immobilisation,” 2nd IEEE Int. Conf. on NEMS, pp. 659-663, January, Bankok, Thailand, 2007.

[8] [8] J. J. Nagel, G.Mikhail, H. Noh, and J. Koo, “Magnetically Actuated Micropumps Using an Fe-PDMS Composite Membrane,” Proc. of SPIE, 6172, 1, 617213, pp. 1-9, 2006.

[9] [9] C. Yamahata, C. Lotto, E. M. Al-Assaf, and A. M. Gijs, “A PMMA valveless micropump using electromagnetic actuation,” Microfluid Nanofluid, 1, pp. 197-207, 2005.

[10] [10] A. Hatch, A. E. Kamholz, G. Holman, P. Yager, and K. F. Bohringer, “A ferrofluidic magnetic micropump,” Journal of Microelectromechanical Systems, 10, pp. 215-221, 2001.

[11] [11] W. C. Williams, H. D. Tran, M. J. O’Brien, E. Rabinovich, and G. P. Lopez, “Rapid prototyping of active microfluidic components based on magnetically modified elastomeric materials,” Journal of Vacuum and Science and Technology, B19, 2, pp. 596-599, 2001.

[12] [12] D. Olivier, T. Abdelkrim, D. Yves, G. Leticia, T. Nicolas, P. Phillippe, P. Vladimir, and M. Alain, “Magnetically Actuated Microvalve for Active Flow Control,” Journal of Physics: Conference Series, 34, pp. 631-636, 2006.

[13] [13] C. J. Campbell and B. A. Grzybowski, “Microfluidic Mixers: from Microfabricated to Self-assembling Devices,” Phil. Trans. R. Soc. Lond. A, 362, pp. 1069-1086, 2004.

[14] [14] P. K. Yuen, G. Li, Y. Bao, and U. R. Müller, “Microfluidic Devices for Fluidic Circulation and Mixing Improve Hybridization Signal Intensity on DNA Arrays,” Lab on a Chip, 3, pp. 46-50, 2003.

[15] [15] J. Atencia and D. J. Beebe, “Steady Flow Generation in Microcirculatory Systems,” Lab on a Chip, 6, pp. 567-574, 2006.

[16] [16] Z. Zhang, P. Boccazzi, H.-G. Choi, G. Perozziello, A. J. Sinskey, and K. F. Jensen, “Microchemostat-microbial Continous Cluture in a Polymer-based Instrumentd Microbioreactor,” Lab on a Chip, 6, pp. 906-913, 2006.

[17] [17] K. S. Wilson, J. D. Goff, J. S. Riffle, L. A. Harris, and T. G. St Pierre, “Polydimethylsiloxane-magnetite Nanoparticle Complexes and Dispersions in Polysiloxane Carrier Fluids,” Polyners for Advanced Technologies, 16, pp. 200-211, 2005.

[18] [18] B. J. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-Dimensional Micro-Chanel Fabrication in Polydimethylsiloxane (PDMS) Elastomer,” Journal of Microelectromechanical Systems, 9, 1, pp. 76-81, 2000.