JRM Vol.20 No.2 pp. 273-279
doi: 10.20965/jrm.2008.p0273


Production and Application of High-Accuracy Polymer-Based Magnetically Driven Microtool

Yoko Yamanishi, Shinya Sakuma, and Fumihito Arai

Department of Bioengineering and Robotics, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan

September 30, 2007
December 29, 2007
April 20, 2008
MEMS, biochip, μ-TAS, magnetically-driven actuation
We discuss a novel magnetically driven polymeric microtool for non-intrusive and non-contaminating experiments on a chip. The composite is formed by suspending magnetite particles (Fe3O4) in polydimethylsiloxane (PDMS). To obtain precise, complex patterns from magnetically driven microtools, photolithography has been applied taking advantage of thick KMPR-1050 photoresist as a sacrificed mold. The microtool surface was coated to suppress stiction in the biochip. These microtools feature 1. fabrication of any shape, 2. softness (harmless to cells), 3. no stiction, and 4. mass production at low cost enabling disposability. We demonstrate versatile mass-produced magnetically driven microtools such as stirrers and valves. The potential impact of this technology includes sample selection and separation, cell immobilization, mixing and reaction into portable microfluidic labs-on-a-chip, and long-term culture and cell loading.
Cite this article as:
Y. Yamanishi, S. Sakuma, and F. Arai, “Production and Application of High-Accuracy Polymer-Based Magnetically Driven Microtool,” J. Robot. Mechatron., Vol.20 No.2, pp. 273-279, 2008.
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