Improvement in a Surface Motor-Driven Planar Motion Stage
Wei Gao, Katsutoshi Horie, Songyi Dian, Kei Katakura,
and Satoshi Kiyono
Nanosystems Engineering Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Sendai 980-8579, Japan
We report a surface motor-driven planar motion stage with an XYθZ surface encoder. The surface motor consists of two pairs of linear motors. Magnetic arrays are installed on the platen and stator windings of linear motors on the stage base. The platen is moved in the X and Y directions by X and Y linear motors. It is rotated around the Z axis by moment generated by the X or Y linear motors. The surface encoder consists of two two-dimensional (2D) angle sensors and an angle grid with 2D sinusoidal surface waves. The angle grid is installed on the platen. Sensors onside make the stage compact. The surface encoder is improved for higher positioning accuracy. Measurement errors of the surface encoder using two detectors – a quadrant PD and 2D PSD – are determined by simulation. The surface motor for increasing stage speed is modified. We conducted experiments comparing the previous prototype stage (Prototype I) and the improved stage (Prototype II).
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