Improvement in a Surface Motor-Driven Planar Motion Stage
Wei Gao, Katsutoshi Horie, Songyi Dian, Kei Katakura,
and Satoshi Kiyono
Nanosystems Engineering Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Sendai 980-8579, Japan
We report a surface motor-driven planar motion stage with an XYθZ surface encoder. The surface motor consists of two pairs of linear motors. Magnetic arrays are installed on the platen and stator windings of linear motors on the stage base. The platen is moved in the X and Y directions by X and Y linear motors. It is rotated around the Z axis by moment generated by the X or Y linear motors. The surface encoder consists of two two-dimensional (2D) angle sensors and an angle grid with 2D sinusoidal surface waves. The angle grid is installed on the platen. Sensors onside make the stage compact. The surface encoder is improved for higher positioning accuracy. Measurement errors of the surface encoder using two detectors – a quadrant PD and 2D PSD – are determined by simulation. The surface motor for increasing stage speed is modified. We conducted experiments comparing the previous prototype stage (Prototype I) and the improved stage (Prototype II).
-  Y. Tomita, Y. Koyanagawa, and F. Satoh, “A surface motordriven precision positioning system,” Precision Engineering, 16-3, pp. 184-191, 1994.
-  W. J. Kim and D. L. Trumper, “High-precision magnetic levitation stage for photolithography,” Precision Engineering, 22-2, pp. 66-77, 1998.
-  M. A. Soltz, Y. L. Yao, and J. Ish-Shalom, “Investigation of a 2-D planar motor based machine tool motion system,” International Journal of Machine Tools & Manufacture, 39, pp. 1157-1169, 1999.
-  M. Holmes, R. Hocken, and D. Trumper, “The long-range scanning stage: a novel platform for scanned-probe microscopy,” Precision Engineering, 24-3, pp. 191-209, 2000.
-  E. Shamoto, H. Murase, and T. Moriwaki, “Ultra-precision 6-axis table driven by means of walking drive,”Annals of the CIRP, 49-1, pp. 299-302, 2000.
-  R. Hocken, D. Trumper, and C.Wang, “Dynamics and control of the UNCC/MIT sub-atomic measuring machine,” Annals of the CIRP, 50-1, pp. 373-376, 2001.
-  H. Kunzmann, T. Pfeifer, and J. Flugge, “Scales vs laser interferometers, performance and comparison of two measuring systems,” Annals of the CIRP, 42-2, pp. 753-767, 1993.
-  C. R. Steinmetz, “Sub-micron position measurement and control on precision machine tools with laser interferometry,” Precision Engineering, 12-1, pp. 12-24, 1990.
-  S. Kiyono, P. Cai, and W. Gao, “An angle-based position detection method for precision machines,” JSME Int. J., 42-1, pp. 44-48, 1999.
-  W. Gao, S. Dejima, Y. Shimizu, and S. Kiyono, “Precision measurement of two-axis positions and tilt motions using a surface encoder,” Annals of the CIRP, 52-1, 52-2, pp. 435-438, 2003.
-  W. Gao, S. Dejima and S. Kiyono, “A Dual-Mode Surface Encoder for Position Measurement,” Sensors and Actuators A, 117/1, pp. 95-102, 2005.
-  W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, and Y. Tomita, “A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning,” Precision Engineering, 28-3, pp. 329-337, 2004.
-  S. Dejima, W. Gao, K. Katakura, S. Kiyono, and Y. Tomita, “Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning,” Precision Engineering, 29-3, 263-27114, 2005.
-  W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precision Engineering, 26-4, pp. 396-404, 2002.
-  Y. Watanabe, W. Gao, H. Shimizu, and S. Kiyono, “Analysis of a surface encoder in wave optics,” Key Engineering Materials, Vol.257-258, pp. 219-224, 2003.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.
Copyright© 2006 by Fuji Technology Press Ltd. and Japan Society of Mechanical Engineers. All right reserved.