A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves
Jung-Ho Park*, Kazuhiro Yoshida*, Chikara Ishikawa**,
Shinichi Yokota*, Takeshi Seto***, and Kunihiko Takagi***
*Precision and Intelligence Laboratory, Tokyo Institute of Technology
**Graduate School, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
***Communications Device R&D Department, Seiko Epson Corporation, 3-3-5 Owa, Suwa-shi, Nagano-ken 392-8502, Japan
A novel high-output resonance-driven piezoelectric micropump using two active check valves in place of conventional passive check valves used in inlet and outlet is proposed. It actively controls opening/closing of check valves using piezoelectric actuator synchronizing with expansion/contraction of pump chamber. A prototype micropump is fabricated with an effective size of 17×8×1mm3. When tap water is used as the working fluid, pumping characteristics of the fabricated pump are experimentally investigated using an adequate timing control for valve opening/closing. From experimental results, it is ascertained that optimal values of the phase shift for the voltage to drive the pump chamber to realize a miniaturized but powerful micropump are 15° in inlet check valve and 195° in outlet. Based on obtained results, a sheet active shuttle valve that has a unified valve body for inlet and outlet check valves is newly proposed. A micropump with an effective size of 10×10×10mm3 is fabricated and the basic characteristics are experimentally investigated.
-  Takeda, M., “Applications of MEMS to Industrial Inspection,” Proc. MEMS2001, pp. 182-191, 2001.
-  Gaugel, T., et al., “Building a mini-factory from a technology construction kit,” Proc. 3rd International Workshop on Microfactories,” pp. 5-8, 2002.
-  Yoshida, K., Takahashi, K. & Yokota, S. “An In-Pipe Mobile Micromachine Using Fluid Power (A Mechanism Adaptable to Pipe Diameters),” JSME International Journal (Ser. B), Vol.43, No.1, pp. 29-35, 2000.
-  Yoshida, K., Park, J.-H., Shimizu, T. & Yokota, S., “A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous Electro-Rheological Fluid,” Proc. 3rd IFToMM International Micromechanisms Symposium, pp. 2-7, 2001.
-  Park, J.-H., Yokota, S. & Yoshida, K., “A Piezoelectric Micropump Using Resonance Drive with High Power Density,” JSME International Journal (Ser.C), Vol.45, No.2, pp. 502-509, 2002.
-  Park, J.-H., Yoshida, K. & Yokota, S., “Resonantly Driven Piezoelectric Micropump (Fabrication of a micropump having high power density),” MECHATRONICS, Vol.9, No.7, pp. 687-702, 1999.
-  Kohl, M., Skrobanek, K. D. & Miyazaki, S., “Development of stress-optimized shape memory microvalves,” Sensors and Actuators A, Vol. 72-3, pp. 243-250, 1999.
-  Grosjean, C., Yang, X. & Tai, Y.C., “A Practical Thermopneumatic Valve,” Proc. IEEE Micro Electro Mechanical Systems (MEMS) 1999, pp. 147-152, 2000.
-  Sinohara, J., Suda, M., Furuta, K. & Sakuhara, T., “A High Pressure-Resistance Micropump Using Active and Normally-Closed Valves,” Proc. IEEE Micro Electro Mechanical Systems (MEMS) 2000, pp. 86-91, 2000.
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