JRM Vol.16 No.2 pp. 171-177
doi: 10.20965/jrm.2004.p0171


A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves

Jung-Ho Park*, Kazuhiro Yoshida*, Chikara Ishikawa**,
Shinichi Yokota*, Takeshi Seto***, and Kunihiko Takagi***

*Precision and Intelligence Laboratory, Tokyo Institute of Technology

**Graduate School, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan

***Communications Device R&D Department, Seiko Epson Corporation, 3-3-5 Owa, Suwa-shi, Nagano-ken 392-8502, Japan

October 24, 2003
December 24, 2003
April 20, 2004
micropump, piezoelectric actuator, check valve, shuttle valve, timing control, phase shift, bi-directional flow

A novel high-output resonance-driven piezoelectric micropump using two active check valves in place of conventional passive check valves used in inlet and outlet is proposed. It actively controls opening/closing of check valves using piezoelectric actuator synchronizing with expansion/contraction of pump chamber. A prototype micropump is fabricated with an effective size of 17×8×1mm3. When tap water is used as the working fluid, pumping characteristics of the fabricated pump are experimentally investigated using an adequate timing control for valve opening/closing. From experimental results, it is ascertained that optimal values of the phase shift for the voltage to drive the pump chamber to realize a miniaturized but powerful micropump are 15° in inlet check valve and 195° in outlet. Based on obtained results, a sheet active shuttle valve that has a unified valve body for inlet and outlet check valves is newly proposed. A micropump with an effective size of 10×10×10mm3 is fabricated and the basic characteristics are experimentally investigated.

Cite this article as:
Jung-Ho Park, Kazuhiro Yoshida, Chikara Ishikawa,
Shinichi Yokota, Takeshi Seto, and Kunihiko Takagi, “A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves,” J. Robot. Mechatron., Vol.16, No.2, pp. 171-177, 2004.
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Last updated on Mar. 05, 2021