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JRM Vol.15 No.3 pp. 331-340
doi: 10.20965/jrm.2003.p0331
(2003)

Paper:

A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed

Mitsuhiro Ishihara

Research and Development Center, Takaoka Electric Mfg. Co., Ltd. 3-1 Yoshinomachi Nishibiwajima-Cho, Nishikasugai, Aichi, 452-8604 Japan

Received:
December 5, 2002
Accepted:
February 16, 2003
Published:
June 20, 2003
Keywords:
confocal, measurement, three-dimension, rough surface, noncontact
Abstract

We discuss a confocal surface measurement system having improved accuracy for rough surfaces and speed. To enhance speed, we propose (1) a novel nonscanning confocal microscope, (2) a fast object surface reconstruction algorithm, and (3) an optical focused plane shift mechanism. The system we developed operates at speeds exceeding a million points per second. To improve accuracy for rough surfaces, we propose optical smoothing using confocal beam spot microscanning. Results of experiments confirmed that the system measures rough surfaces nearly as accurately as smooth surfaces.

Cite this article as:
Mitsuhiro Ishihara, “A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed,” J. Robot. Mechatron., Vol.15, No.3, pp. 331-340, 2003.
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