A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed

Mitsuhiro Ishihara

doi:10.20965/jrm.2003.p0331

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JRM Vol.15 No.3 pp. 331-340

doi: 10.20965/jrm.2003.p0331

(2003)

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A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed

Mitsuhiro Ishihara

Research and Development Center, Takaoka Electric Mfg. Co., Ltd. 3-1 Yoshinomachi Nishibiwajima-Cho, Nishikasugai, Aichi, 452-8604 Japan

Received:

December 5, 2002

Accepted:

February 16, 2003

Published:

June 20, 2003

Keywords:

confocal, measurement, three-dimension, rough surface, noncontact

Abstract

We discuss a confocal surface measurement system having improved accuracy for rough surfaces and speed. To enhance speed, we propose (1) a novel nonscanning confocal microscope, (2) a fast object surface reconstruction algorithm, and (3) an optical focused plane shift mechanism. The system we developed operates at speeds exceeding a million points per second. To improve accuracy for rough surfaces, we propose optical smoothing using confocal beam spot microscanning. Results of experiments confirmed that the system measures rough surfaces nearly as accurately as smooth surfaces.

Cite this article as:

M. Ishihara, “A Confocal Surface Measurement System Having Improved Measurement Accuracy for Rough Surfaces and Measurement Speed,” J. Robot. Mechatron., Vol.15 No.3, pp. 331-340, 2003.

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