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IJAT Vol.16 No.4 pp. 464-470
doi: 10.20965/ijat.2022.p0464
(2022)

Paper:

Bipolar Electrostatic Driving of Isolated Micro-Resonator for Sensing High Voltage of Battery Output with Resolution

Naoki Nobunaga*, Shinya Kumagai**, and Minoru Sasaki*,†

*Toyota Technological Institute
2-12-1 Hisakata, Tenpaku-ku, Nagoya, Aichi 468-8511, Japan

Corresponding author

**Meijo University, Nagoya, Japan

Received:
December 5, 2021
Accepted:
April 20, 2022
Published:
July 5, 2022
Keywords:
bipolar electrostatic driving, isolated micro-resonator, high voltage sensing, battery output
Abstract

Electrostatic Si resonator was applied to sense the voltage at the facing electrode in a highly isolated approach. The resonant frequency shifts under the effect of the electrical field from the facing electrode connected to the high voltage (corresponding to the battery). Here, two resonators are fabricated. The electrical isolation was obtained by driving the resonators to be floated electrically. The charging of the resonator causes the fluctuation of the driving performance, degrading the sensing resolution. The driving voltage was set to be bipolar to avoid the fluctuation. This novel method stabilizes the resonant frequency realizing 0.25 V accuracy against 80 V. Feasibility for measuring the voltage up to 420 V is demonstrated.

Cite this article as:
N. Nobunaga, S. Kumagai, and M. Sasaki, “Bipolar Electrostatic Driving of Isolated Micro-Resonator for Sensing High Voltage of Battery Output with Resolution,” Int. J. Automation Technol., Vol.16, No.4, pp. 464-470, 2022.
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Last updated on Dec. 01, 2022