IJAT Vol.16 No.4 pp. 456-463
doi: 10.20965/ijat.2022.p0456

Technical Paper:

Control of Spindle Position and Stiffness of Aerostatic-Bearing-Type Air Turbine Spindle

Tomohiro Tanaka*, Tomonori Kato*,†, Tatsuki Otsubo**, Atsuhiro Koyama**, and Takanori Yazawa**

*Fukuoka Institute of Technology
3-30-1 Wajiro-higashi, Higashi-ku, Fukuoka-shi, Fukuoka 811-0295, Japan

Corresponding author

**Nagasaki University, Nagasaki, Japan

December 3, 2021
March 7, 2022
July 5, 2022
pneumatics, air turbine spindle, aerostatic bearing, position and stiffness control

Air turbine spindles with aerostatic bearings are widely used in ultraprecision machining equipment. Ultraprecision grinding processes using air turbine spindles with aerostatic bearings include constant-pressure dry lapping of nano-polycrystalline diamond (NPD) tools and ultraviolet irradiation polishing of chemical vapor deposition diamond films. In the dry lapping of NPD tools, it is necessary to achieve constant-pressure grinding while flexibly adjusting the contact force between the NPD tool and the truer fixed on the end face of the aerostatic spindle to form a nose bite with a cutting-edge rounding radius, R, of 0.1 nm. However, it is common for operators to manually adjust the cut depth and the air pressure supplied to the aerostatic bearing by relying on the noise and rotation speed during machining. Moreover, aerostatic spindles without a control mechanism, such as active bearings, are widely used because of their low costs and versatility. For several years, the authors have been developing a method to control air bearing stiffness by controlling the bearing supply pressure with high speeds and precision using a high-precision quick response regulator for aerostatic spindles without a control mechanism, such as active bearings. In this study, the compliance control (control of spindle position and stiffness) of aerostatic bearings was investigated using the proposed method, and the effectiveness of the method to ultraprecision grinding applications was demonstrated.

Cite this article as:
T. Tanaka, T. Kato, T. Otsubo, A. Koyama, and T. Yazawa, “Control of Spindle Position and Stiffness of Aerostatic-Bearing-Type Air Turbine Spindle,” Int. J. Automation Technol., Vol.16, No.4, pp. 456-463, 2022.
Data files:
  1. [1] H. Mizumoto, T. Matsubara, H. Yamamoto, K. Okuno, and M. Yabuya, “An Infinite Stiffness Aerostatic Bearing with an Exhaust-Control Restrictor,” P. Seyfried, H. Kunzmann, P. McKeown, and M. Weck (Eds.), “Progress in Precision Engineering,” pp. 315-316, Springer, doi: 10.1007/978-3-642-84494-2_35, 1991.
  2. [2] H. Mizumoto, H. Tanaka, K. Okuno, T. Matsubara, and R. Kawakami, “An Active Air Bearing – Ultra-Precision Control of Floating Position and Vibration –,” J. of the Japan Society of Precision Engineering, Vol.57, No.11, pp. 2054-2059, doi: 10.2493/jjspe.57.2054, 1991 (in Japanese).
  3. [3] A. Shimokobe, “Principles and Applications of Active Aerostatic Bearing -1-,” Science of Machine, Vol.42, No.4, pp. 475-481, 1990 (in Japanese).
  4. [4] S. Koizumi, “Ultra-precision Machining and its Application to Advanced Accelerators (4),” J. of Particle Accelerator Society of Japan, Vol.3, No.2, pp. 137-143, 2006 (in Japanese).
  5. [5] T. Miyaguchi, M. Masuda, E. Takeoka, and H. Iwabe, “Effect of tool stiffness upon tool wear in high spindle speed milling using small ball end mill,” Precision Engineering, Vol.25, No.2, pp. 145-154, doi: 10.1016/S0141-6359(01)00067-8, 2001.
  6. [6] T. Matsumura and Y. Ueki, “Milling of micro grooves on glass cylinder surface,” Int. J. Automation Technol., Vol.5, No.1, pp. 11-20, doi: 10.20965/ijat.2011.p0011, 2011.
  7. [7] M. Yabuya, “The future of ultraprecision machine tool and its element technology,” J. of the Japan Society of Precision Engineering, Vol.75, No.1, pp. 126-127, doi: 10.2493/jjspe.75.126, 2009 (in Japanese).
  8. [8] T. Hirayama, K. Sasaki, and H. Yabe, “Pneumatic Servo Bearing Actuator for Ultraprecise Positioning (1st Report) – Presentation of Fundamental Characteristics through the System Representation –,” J. of the Japan Society of Precision Engineering, Vol.74, Vol.10, pp. 1086-1091, doi: 10.2493/jjspe.74.1086, 2008 (in Japanese).
  9. [9] S. Yamazaki and Y. Nakao, “Trial study of displacement of aerostatic bearings using flow control valve,” Proc. of the 55th Hokuriku-Shinetsu Shibu Conf., The Japan Society of Mechanical Engineers, A044, doi: 10.1299/jsmehs.2018.55.A044, 2018 (in Japanese).
  10. [10] H. Mizumoto, Y. Tanaka, Y. Yabuta, S. Arii, Y. Tazoe, and S. Yokouchi, “A high-speed air spindle employing active aerodynamic bearing system,” Proc. of 10th Anniversary Int. Conf. of the euspen, Vol.1, pp. 394-397, 2008.
  11. [11] H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, and S. Yokouchi, “An active aerodynamic bearing for ultraprecision machining,” Proc. of 1st Int. Conf. of the euspen, Vol.1, pp. 300-303, 2010.
  12. [12] H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, K. Atoji, and T. Hirose, “Active control of high-speed precision air-bearing spindle,” Proc. of 11th Int. Conf. of the euspen, Vol.1, pp. 355-358, 2011.
  13. [13] H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, and T. Hirose, “Active aerodynamic bearing for high-speed air-bearing spindle,” Proc. of 4th Int. Conf. of the ASPEN, Vol.1, pp. 300-303, 2011.
  14. [14] H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, and T. Hirose, “Performance of high-speed precision air-bearing spindle with active aerodynamic bearing,” Proc. of 12th Int. Conf. of the euspen, Vol.1, pp. 356-359, 2012.
  15. [15] H. Mizumoto, Y. Tazoe, T. Hirose, and K. Atoji, “Performance of High-Speed Precision Air-Bearing Spindle with Active Aerodynamic Bearing,” Int. J. Automation Technol., Vol.9, No.3, pp. 297-302, doi: 10.20965/ijat.2015.p0297, 2015.
  16. [16] T. Nakano, M. Touge, and J. Watanabe, “Study of Mirror Finishing of PCD by Constant-pressure Dry Grinding,” J. of the Japan Society for Abrasive Technology, Vol.52, No.7, pp. 400-405, doi: 10.11420/jsat.52.400, 2008 (in Japanese).
  17. [17] K. Kinoshita, M. Touge, T. Nakano, and J. Watanabe, “Study on Constant-pressure Grinding and Precision Polishing Technology of CVD Diamond Film,” Proc. of the Autumnal Conf. of the Japan Society for Precision Engineering, ID F37, pp. 443-444, 2008 (in Japanese).
  18. [18] T. Senba, Y. Amamoto, H. Fujiyama, S. Hashimoto, and H. Sumiya, “Dry Grinding of Nano-Polycrystalline Diamond Using Thermochemical Reaction,” Trans. of the Japan Society for Mechanical Engineers, Series C, Vol.79, No.807, pp. 4513-4523, doi: 10.1299/kikaic.79.4513, 2013 (in Japanese).
  19. [19] K. Nishida, T. Kato, and K. Ishimoto, “Realization of Variable Shaft Stiffness of Aerostatic Bearing Type Air Turbine Spindle,” Proc. of 2016 Annual Conf. of Kyushu Branch of the Japan Society for Precision Engineering in Kitakyushu, pp. 27-28, 2016 (in Japanese).
  20. [20] K. Kawashima, T. Kato, S. Yamazaki, and T. Kagawa, “Development of a Precise and High Response Pressure Regulator for Gases,” J. of the Japan Fluid Power System Society, Vol.45, No.1, pp. 8-14, doi: 10.5739/jfps.38.29, 2014 (in Japanese).
  21. [21] K. Tanie and T. Fukuda, “Compliance Control of a Robotic Arm and its Application to Soft Contact Tasks,” J. of the Japan Society for Precision Engineering, Vol.55, No.7, pp. 1189-1193, doi: 10.2493/jjspe.55.1189, 1989 (in Japanese).
  22. [22] K. Tanaka, S. Kimura, K. Suzuki, and T. Uematsu, “Development of an Ultra-precision Machine Tool – 1st report: Improvement of Performance of an Aerostatic Bearing Spidle with an Annular Restrictor –,” J. of the Japan Society for Abrasive Technology, Vol.51, No.5, pp. 302-307, doi: 10.11420/jsat.51.302, 2007 (in Japanese).
  23. [23] T. Kato, G. Higashijima, T. Yazawa, T. Otsubo, and K. Tanaka, “Proposal of Disturbance-Compensating and Energy-Saving Control Method of Air Turbine Spindle and Evaluation of Its Energy Consumption,” Precision Engineering, Vol.43, pp. 439-447, doi: 10.1016/j.precisioneng.2015.09.009, 2016.
  24. [24] K. Kawashima and T. Kagawa, “Unsteady flow generator for gases using an isothermal chamber,” Measurement, Vol.33, pp. 333-340, doi: 10.1016/S0263-2241(03)00003-4, 2003.
  25. [25] K. Kawashima, T. Kato, Y. Yamazaki, M. Yanagisawa, and T. Kagawa, “Development of slit type pressure differentiator using an isothermal chamber,” Measurement Science and Technology, Vol.16, pp. 1150-1156, doi: 10.1088/0957-0233/16/5/015, 2005.

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Last updated on Aug. 05, 2022