Design Concept and Structural Configuration of Magnetic Levitation Stage with Z-Assist System
Research and Development Group, Hitachi, Ltd.
832-2 Horiguchi, Hitachinaka, Ibaraki 312-0034, Japan
Magnetic levitation technology is expected to provide a solution for achieving nanometer-scale positioning accuracy. However, magnetic leakage limits the application of the magnetic levitation stage. To reduce magnetic density, motors should be installed at an appropriate distance from the table. This increases the axis interference between the horizontal thrust and the pitching, making it difficult to achieve stable levitation. In this study, a magnetic levitation stage system that has a unique motor structure fusing a gravity compensation function and pitching moment compensation is proposed. This compensation mechanism operates automatically using the passive magnetic circuit structure, ensuring that noises from the coil current and the timing gaps do not affect the driving characteristics and that neither wiring nor sensors are required. The basic characteristics were evaluated through the driving experiments, and the efficiency of the proposed gravity and pitching moment compensation system was demonstrated.
-  H. Shinno et al., “X-Y-θ Nano-Positioning Table System for a Mother Machine,” Annals of the CIRP, Vol.53, pp. 337-340, 2004.
-  H. Yoshioka and H. Shinno, “Design Concept and Structural Configuration of Advanced Nano-Pattern Generator with Large Work Area “ANGEL”,” Int. J. Automation Technol., Vol.5, No.1, pp. 38-44, 2011.
-  H. Shinno and H. Hashizume, “High Speed Nanometer Positioning Using a Hybrid Linear Motor,” CIRP Annals, Vol.50, No.1, pp. 243-246, 2001.
-  Y. Tomita, M. Sugimine, and Y. Koyanagawa, “Development of Six-Axis Precise Positioning System Driven by Surface Motor,” Trans. of the Japan Society of Mechanical Engineers, Series C, Vol.62, No.597, pp. 1840-1847, 1996.
-  M. Takahashi, H. Yoshioka, and H. Shinno, “A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator,” J. of Advanced Mechanical Design, Systems, and Manufacturing, Vol.2, No.3, pp. 356-365, 2008.
-  A. Peijinenburg, J. Vermeulen, and J. Eijk, “Magnetic levitation systems compared to conventional bearing systems,” Microelectronic Engineering, Vol.83, No.4-9, pp. 1372-1375, 2006.
-  W. Kim and D. Trumper, “High-precision magnetic levitation stage for photolithographym,” Precision Engineering, Vol.22, No.2, pp. 66-77, 1998.
-  P. Berkelman and Y. Lu, “Long Range Six Degree-of-Freedom Magnetic Levitation Using Low Cost Sensing and Control,” J. Robot. Mechatron., Vol.32, No.3, pp. 683-691, 2020.
-  L. Zhou and D. Trumper, “Finite element model for pre-magnetized linear hysteresis motors,” Proc. of the 33th Annual Conf. of American Society of Precision Engineering, pp. 121-126, 2019.
-  L. Zhou and D. Trumper, “Magnetically levitated linear stage for in-vacuum transportation tasks,” Proc. of the 33th Annual Conf. of American Society of Precision Engineering, pp. 1-6, 2018.
-  K. Tanaka, “Development of 6DOF Magnetic Levitation Stage for Lithography Tool – Proof of Concept (Second Report) –,” J. of the Japan Society for Precision Engineering, Vol.75, No.5, pp. 605-611, 2009.
-  T. Shinshi, “A linear table system using repulsive forces of permanent magnets (Static stiffness of levitated table and its stabilization using two-axis control),” Trans. of the Japan Society of Mechanical Engineers, Series C, Vol.67, No.653, pp. 232-239, 2001.
-  Y. Kubota et al., “Development of Ultraprecision Stage by Magnetic Levitation,” Proc. of the Japan Society for Precision Engineering Autumn Meeting 2012, A01, 2012.
-  J. C. Compter, “Electro-dynamic planar motor,” Precision Engineering, Vol.28, No.2, pp. 171-180, 2003.
-  H. Butler and W. Simons, “Position control in lithographic equipment,” Proc. of the ASPE 2013 Spring Topical Meeting on Precision Control for Advanced Manufacturing Systems, pp. 7-12, 2013.
-  L. Kramer, T. Dool, and G. Witvoet, “Demonstrator for nano-precision multi-agent MagLev positioning platform for high throughput metrology,” IFAC-PapersOnLine, Vol.52, No.15, pp. 471-476, 2019.
-  D. Laro, “Through the Wall,” MIKRONIEK, No.1, pp. 31-35, 2013.
-  A. Goos et al., “Magnetic levitated linear scan module with nanometer resolution,” Proc. of the 35th Annual Conf. of American Society of Precision Engineering, pp. 58-62, 2020.
-  M. Takahashi, H. Ogawa, and M. Odai, “A Study on Nanometer-Scale Vibration Canceller for Ultra Precision Positioning Stage,” J. of the Japan Society for Precision Engineering, Vol.83, pp. 956-961, 2017.
-  M. Takahashi, H. Ogawa, and T. Kato, “Development of compact maglev stage system for nanometer-scale positioning,” Proc. of the 34th Annual Conf. of American Society of Precision Engineering, pp. 352-357, 2019.
-  M. Takahashi, H. Ogawa, and T. Kato, “Compact maglev stage system for nanometer-scale positioning,” Precision Engineering, Vol.66, No.11, pp. 519-530, 2020.
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