This paper presents the dynamic characteristics of a hybrid guideway system that employs sliding guides as the primary support and rolling guides to decrease the friction force and improve servo response. A drive table with a linear motor was fabricated, and the dynamic responses of the proposed hybrid guideway to command input and disturbances were measured. The results indicate that the developed guideway system provides high dynamic stiffness without sacrificing the accuracy of servo response. Furthermore the floating action of the table influenced the dynamic compliance of the guide in the horizontal direction.

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