To improve surface roughness, machining efficiency, and accuracy of a workpiece, measuring the roughness and contours of a cutting tool edge is crucial. However, it has not been easy for a contact stylus or non-contact methods to measure the roughness and contours of a sharp edge for two reasons: doing so damages the contact stylus and steep angles produce poor reflected rays for the non-contact method. A point autofocus probe (PAP) is widely used for the roughness and contour measurements of various precision machining surfaces. The authors have developed a new method of measuring a cutting tool edge, a method using PAP with three-axis liner stages and a rotary stage. In this study, a cutting tool edge for micro-fabrication was precisely measured, and the roughness relationships of the cutting tool edge and workpiece surface were quantitatively evaluated.

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