Paper:
Minimizing Burrs and Defects on Microstructures with Laser Assisted Micromachining Technology
Shaolin Xu*,†, Shinsaku Osawa**, Ryuichi Kobayashi**, Keita Shimada**, Masayoshi Mizutani**, and Tsunemoto Kuriyagawa*
*Division of Biomechanical Engineering, Graduate School of Biomedical Engineering, Tohoku University
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan
†Corresponding author,
**Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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