single-au.php

IJAT Vol.10 No.4 pp. 639-646
doi: 10.20965/ijat.2016.p0639
(2016)

Paper:

Fabrication and Control of Fine Periodic Surface Structures by Short Pulsed Laser

Shuhei Kodama*,†, Akihiro Shibata**, Shinya Suzuki**, Keita Shimada*, Masayoshi Mizutani*, and Tsunemoto Kuriyagawa*

*Tohoku University
6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai 980-8579, Japan

Corresponding author,

**Dexerials Corporation, Miyagi, Japan

Received:
February 1, 2016
Accepted:
May 6, 2016
Published:
July 5, 2016
Keywords:
short-pulsed laser, collisional relaxation time, effective fluence range, temperature, laser wavelength
Abstract

Ultrashort-pulsed laser irradiation is a more efficient approach to the fabrication of fine surface structures than traditional processing methods. However, it has some problems: the equipment expenses usually increase as the pulse shortens, and the process principle has not been clarified completely, although the collisional relaxation time (CRT) is assumed to be a major factor. In this study, a 20-ps pulsed laser was employed to fabricate nanometer-sized periodic structures on a stainless steel alloy, SUS304. The pitch length of the fabricated fine periodic structures was similar to the laser wavelength, and the results suggested that periodic structures could be fabricated within a limited range of the laser fluence. In order to expand the effective fluence range (EFR) and to control the pitch length, laser irradiation was carried out with different workpiece temperatures and the laser wavelengths. In this way, CRT was extended and EFR was expanded by cooling the workpiece, and the pitch lengths were approximately equal to the laser wavelengths. As a result, two things were found: it is easier to fabricate the fine periodic structures by cooling the workpiece, and it is possible to control the pitch length of the fine periodic structures by changing the laser wavelength.

Cite this article as:
S. Kodama, A. Shibata, S. Suzuki, K. Shimada, M. Mizutani, and T. Kuriyagawa, “Fabrication and Control of Fine Periodic Surface Structures by Short Pulsed Laser,” Int. J. Automation Technol., Vol.10, No.4, pp. 639-646, 2016.
Data files:
References
  1. [1] M. Koishi, “Surface functionalization design technology of practical materials for manufacturing,” Industrial technology service center, Inc., 2010.
  2. [2] Y. Tanaka, “Fabrication of Anti-reflective Structures using Glass Molding,” NEW GLASS, Vol.23, No.4, 2008.
  3. [3] Toray Research Center, Water-repelling technology, Reimeisha.
  4. [4] S. Takeda, K. Kawahara, H. Sawada, and M. Nakamura, “Effects of femtosecond laser induced nanotopography of titanium on osteoblast-like cells,” The Japanese Society for Dental Materials and Devices, Vol.25, No.5.
  5. [5] N. Yasumaru, K. Miyazaki, and J. Kikuchi, “Control of Tribological Properties of Hard Thin Films with Femtosecond-Laser-Induced Nanostructuring,” The Review of Laser Engineering, Vol.37, No.7, pp. 504-509, 2009.
  6. [6] S. Sawada, K. Kawahara, T. Ninomiya, K. Kurosawa, and A. Yokotani, “Precise Periodic Structuring with Femtosecond-laser,” Seimitukougakkaishi, Vol.69, No.4, 2003.
  7. [7] M. Hashida, M. Shimizu, and S. Sakabe, “Nano-Abration with Short Pulse Laser,” The Review of Laser Engineering, Vol.33, pp. 514-518, 2005.
  8. [8] M. Hujita and M. Hashida, “Femtosecond-Laser Processing,” J. of Plasma and Fusion Research, Vol.81, Suppl, pp. 195-201, 2005.
  9. [9] B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B, Vol.53, pp. 1749-1761, 1996.
  10. [10] B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Laser-Induced Damage in Dielectrics with Nanosecond to Subpicosecond Pulses,” Phys. Rev. Lett., Vol.74, pp. 2248-2251, 1995.
  11. [11] E. G. Gamaly, A. V. Rode, B. Luther-Davies, and V. T. Tikhonchuk, “Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics,” Phys. Plasmas, Vol.9, pp. 949-957, 2002.
  12. [12] D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett., Vol.64, pp. 3071-3073, 1994.
  13. [13] S. Hayakawa, “Matter and light,” Asakura Publishing Co., Ltd. 1976.
  14. [14] L. Jiang and H. L. Tsai, “Prediction of crater shape in femtosecond laser ablation of dielectrics,” J. Phys. D: Appl. Phys. Vol.37, pp. 1492-1496, 2004.
  15. [15] T. Tomita, “Laser Ablation: From the Viewpoint of Solid State Physics,” J. Plasma Fusion Res., Vol.89, No.7, pp. 493-499, 2013.
  16. [16] K. Miyazaki and G. Miyaji, “Nano-plasma generation and periodic surface structure formation with femtosecond laser pulses,” S6-2.
  17. [17] T. Shinonaga and M. Tsukamoto, “Fablication Creation of New Functional Biomaterials by Periodic Nanostructures Formation with Femtosecond laser,” J. of the Japan Society for Precision Engineering, Vol.81, No.8, pp. 726-730, 2015.
  18. [18] Y. Shimotsuma, P. G. Kazansky, J. R. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Physical Review Letters, Vol.91, No.24, pp. 247-405-1-4, 2003.
  19. [19] M. Hashida, “Basic research about improvement of processing rate of femto second laser process,” The Amada Foundation research briefing report, Vol.26, pp. 160-164, 2013.
  20. [20] M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano, Vol.3, No.12, pp. 4062-4070, 2009.
  21. [21] Miyazaki and G. Miyaji, “Nanograting formation through surface plasmon fields induced by femtosecond laser pulses,” J. of Applied Physics, Vol.114, pp. 153-1081-6, 2013.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, IE9,10,11, Opera.

Last updated on Dec. 05, 2019