single-au.php

IJAT Vol.10 No.4 pp. 574-583
doi: 10.20965/ijat.2016.p0574
(2016)

Paper:

Excitation of Surface Acoustic Wave on a Glass Substrate Using a LiNbO3 Piece

Masaya Takasaki, Hiroyuki Kotani, and Takeshi Mizuno

Graduate School of Science and Engineering, Saitama University
255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan

Corresponding author,

Received:
January 5, 2016
Accepted:
June 16, 2016
Published:
July 5, 2016
Keywords:
ultrasonic transducer, surface acoustic wave, LiNbO3, actuator
Abstract

Surface acoustic waves (SAWs) are used in many applications. Here, we consider application of SAWs to actuators, which require relatively large vibration amplitudes. In conventional applications, a SAW propagates on a LiNbO3 substrate that serves as an elastic medium. This implies that the maximal size of a SAW transducer is limited by the LiNbO3 wafer size. Better actuators require larger-size SAW transducers. Here, we propose a transducer in which an excited SAW propagates on an inexpensive elastic medium (indirect excitation method). The method combines a piezoelectric material and a non-piezoelectric material substrate. These two materials are coupled. Electric energy is provided by an interdigital transducer (IDT). We designed and studied three different transducer configurations. To determine the optimal configuration, various materials and their combinations were considered with the proposed method. Electrical and mechanical characteristics were quantified in terms of the frequency response of admittance and vibration response, respectively. A suitable combination of materials was determined after measuring and analyzing the properties of different transducers. For this combination, the vibration velocity of the novel transducer was as large as that obtained using the conventional direct excitation method.

Cite this article as:
M. Takasaki, H. Kotani, and T. Mizuno, “Excitation of Surface Acoustic Wave on a Glass Substrate Using a LiNbO3 Piece,” Int. J. Automation Technol., Vol.10, No.4, pp. 574-583, 2016.
Data files:
References
  1. [1] M. Kurosawa, M. Takahashi, and T. Higuchi, “Friction drive surface acoustic wave motor,” ELSEVIER, Ultrasonics, Vol.34, pp. 234-246, 1996.
  2. [2] N. Osakabe, M. Kurosawa, T. Higuchi, and O. Shinoura, “Surface acoustic wave linear motor using silicon slider,” Proc. IEEE MEMS, pp. 390-395, 1998.
  3. [3] M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki, and T. Higuchi, “Optimization of Slider Contact Face Geometry for Surface Acoustic Wave Motor,” Proc. IEEE MEMS, pp. 252-255, 2001.
  4. [4] M. K. Kurosawa, H. Itoh, and K. Asai, “Elastic friction drive of surface acoustic wave motor,” Ultrasonics, Vol.41, No.4, pp. 271-275, 2003.
  5. [5] T. Shigematsu and M. K. Kurosawa, “Friction Drive of an SAW Motor. Part I: Measurements,” IEEE Trans. UFFC, Vol.55, No.10, pp. 2005-2015, 2008.
  6. [6] H. Kotani, M. Takasaki, Y. Ishino, and T. Mizuno, “Ultra Low-Velocity Control of a Surface Acoustic Wave Linear Motor,” J. of System Design and Dynamics, Vol.2, No.2, pp. 497-506, 2008.
  7. [7] H. Kotani, Y. Fujii, M. Takasaki, Y. Adachi, Y. Aoki, N. Otake, and T. Mizuno, “Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface (1st Report) – Deposition on Driving Surface and Driving Experiment –,” J. of the Japan Society for Precision Engineering, Vol.74, No.7, pp. 724-729, 2008 (in Japanese).
  8. [8] K. Sakano, M. K. Kurosawa, and T. Shigematsu, “Driving Characteristics of a Surface Acoustic Wave Motor using a Flat-Plane Slider,” Advanced Robotics, Vol.24, No.10, pp. 1407-1421, 2010.
  9. [9] M. Kurosawa, T. Watanabe, A. Futami, and T. Higuchi, “Surface acoustic wave atomizer,” ELSEVIER, Sensors and Actuators, A 50, pp. 69-74, 1995.
  10. [10] M. Kurosawa, T. Watanabe, and T. Higuchi, “Surface acoustic wave atomizer with pumping effect,” Proc. 1995 IEEE Micro Electro Mechanical Systems, pp. 25-30, 1995.
  11. [11] J. W. Kim, Y. Yamagata, M. Takasaki, B. H. Lee, H. Ohmori, and T. Higuchi, “A device for fabricating protein chips by using a surface acoustic wave atomizer and electrostatic deposition,” Sensors and Actuators, B 107, pp. 535-545, 2005.
  12. [12] A. Yamamoto, M. Nishimura, Y. Ooishi, N. Tsukada, and T. Higuchi, “Atomization and Stirring of Droplets Using Surface Acoustic Wave for Integrated Droplet Manipulation,” J. Robot. Mechatro., Vol.18, No.2, pp. 146-152, 2006.
  13. [13] M. Takasaki, T. Nara, S. Tachi, and T. Higuchi, “A Tactile Display Using Surface Acoustic Wave,” Proc. IEEE Int. Work-ship on Robot and Human Interactive Communication, pp. 364-367, 2000.
  14. [14] T. Nara, M. Takasaki, T. Maeda, T. Higuchi, S. Ando, and S. Tachi, “Surface Acoustic Wave Tactile Display,” IEEE Computer Graphics and Applications, Vol.21, pp. 56-63, 2001.
  15. [15] M. Takasaki, T. Nara, and T. Mizuno, “Control Parameters for An Active Type SAW Tactile Display,” Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and systems, pp. 4044-4049, 2004.
  16. [16] M. Takasaki, H. Kotani, T. Endo, T. Nara, and T. Mizuno, “Active Type Surface Acoustic Wave Tactile Display,” Trans. of the Society of Instrument and Control Engineers, Vol.42, No.4, pp. 327-333, 2006.
  17. [17] D.R. Evans, M.F. Lewis, and E. Patterson, “Sputtered ZnO surface-wave transducers,” Electronics Letters, Vol.7, No.18, pp. 557-558, 1971.
  18. [18] A. Adler and P. J. Desmares, “An Economical Touch Panel Using SAW Absorption,” IEEE Trans. on UFFC, Vol.UFFC-34, No.2, pp. 195-201, 1987.
  19. [19] M. C. Brenner and J. J. Fitzgibbon, US patent 4, 644, 100, 1987.
  20. [20] J. Kent, M. Takeuchi, K. Oishi, and R. Adler, “Rayleigh Waves On Love-Wave Substrates For Touch-Sensitive Panels,” Proc. IEEE Ultrasonics Symposium, pp. 337-342, 2001.
  21. [21] M. B. Schulz, B. J. Matsinger and M. G. Holland, “Temperature Dependence of Surface Acoustic Wave Velocity an textless Quartz,” J. of Applied Physics, Vol.41, No.7, pp. 2755-2765, 1970.
  22. [22] J. P. Baker, M. Epstein, and A. P. van den Heuvel, “Precision Micropositioning Using Acoustic Surface Wave variable Delay Lines,” Review of Science Instruments, Vol.45, No.1, pp. 25-27, 1974.
  23. [23] W. L. Bond, C. M. Fortunko, S. L. Quilici, Ho. J. Shaw, and J. Souquet, “Surface Acoustic Wave Probing with Spaced Interdigital Transducers,” Review of Science Instruments, Vol.48, No.6, pp. 682-687, 1977.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, IE9,10,11, Opera.

Last updated on Dec. 11, 2018