Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film  Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

Junpei Sakurai; Seiichi Hata

doi:10.20965/ijat.2015.p0662

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IJAT Vol.9 No.6 pp. 662-667

doi: 10.20965/ijat.2015.p0662

(2015)

Paper:

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Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

Junpei Sakurai and Seiichi Hata

Graduate School of Engineering, Nagoya University
Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

Received:

July 23, 2015

Accepted:

October 8, 2015

Published:

November 5, 2015

Keywords:

microelectromechanical systems, metallic glasses, shape memory alloys, micro fabrication process

Abstract

In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr content of more than 11 at.% undergo glass transitions and are TFMGs. The Ti₃₉Ni₅₀Zr₁₁ TFMG has the lowest glass transition temperature T_g of 703 K and a wide supercooled liquid region ΔT of 57 K. Moreover, it has high thermal stability at T_g. However, the apparent viscosity of the Ti₃₉Ni₅₀Zr₁₁ is higher than those of other Ti-Ni-Zr TFMGs. Moreover, the Ti-Ni-Zr TFMG exhibits higher viscosity than conventional TFMGs because the alloy composition of Ti-Ni-Zr TFMGs/SMAs is far from the eutectic point.

Cite this article as:

J. Sakurai and S. Hata, “Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures,” Int. J. Automation Technol., Vol.9 No.6, pp. 662-667, 2015.

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References

[1] A. Inoue, W. Zhang, T. Zhang, and K. Kurosaka, “High-strength Cu-based bulk glassy alloys in Cu-Zr-Ti and Cu-Hf-Ti ternary systems,” Acta Mater., Vol.49, pp. 2645-2652, 2001.
[2] A. Inoue, B. L. Shen, and R. Yavari, “Super-high strength of over 4000 MPa for Fe-based bulk glassy alloys in [(Fe_1-xCo_x)_0.75B_0.2Si_0.05]₉₆Nb₄ system,” Acta Mater., Vol.52, pp. 4093-4099, 2004.
[3] K. Mondal, B. S. Murty, and U. K. Chatterjee, “Electrochemical behavior of amorphous and nanoquasicrystalline Zr-Pd and Zr-Pt alloys in different environment,” Corros. Sci., Vol.47, pp. 2619-2635, 2005.
[4] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Thin Film Metallic Glass for MEMS and Precise Part,” Proc. Second TIT-BIT Joint Work Shop on Mech. Eng., pp. 62-67, Aug. 2007.
[5] T. Fukushige, S. Hata, and A. Shimokohbe, “A MEMS conical spring actuator array,” Microelectromechnical System, Vol.14, pp. 243-253, 2005.
[6] H.-W. Jeong, S. Hata, and A. Shimokohbe, “Microforming of three-dimensional micro structures from thin film metallic glass,” J. Microelectromech. Syst., Vol.12, pp. 42-52, 2003.
[7] K. Takenaka, N. Saidoh, N. Nishiyama, and A. Inoue, “Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films,” Vol.22, 105302, 2011.
[8] J. Sakurai, S. Hata, and A. Shimokohbe, “Reduction of Electrical Resistivity in PdCuSi Thin Film Metallic Glass,” Proc. Inter. Conf. on Advanced Technology in Experimental Mechanics 2003 (ATEM 2003), OS06W0457 (2003. 8. Nagoya, Japan).
[9] S. Watanabe, J. Sakurai, and S. Hata, “Fabrication of Cu-Zr-Ti Thick Film Metallic Glass structure by Double Metal Mask Lift-off Process,” Microelectr. Engin., Vol.135, pp. 45-51, 2015.
[10] J. Sakurai and S. Hata, “Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization,” Mat. Sci. Eng. A, Vol.541, pp. 8-13, 2012.
[11] J. L. Murray, “Phase Diagram of Binary Titanium Alloys,” American Society for Metals, Metal Park, OH, p. 180, 1987.
[12] H. Y. Kim, M. Mizutani, and S. Miyazaki, “Crystallization process and shape memory properties of Ti-Ni-Zr thin films,” Acta Mater., Vol.57, pp. 1920-1930, 2009.
[13] Y. Liu, S. Hata, K. Wada, and A. Shimokohbe, “Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass,” Jpn., J. Appl. Phys., Vol.40, 5382-5388, 2001.
[14] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System,” Jpn., J. Appl. Phys., Vol.48, 025503, 2009.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] A. Inoue, W. Zhang, T. Zhang, and K. Kurosaka, “High-strength Cu-based bulk glassy alloys in Cu-Zr-Ti and Cu-Hf-Ti ternary systems,” Acta Mater., Vol.49, pp. 2645-2652, 2001.

[2] [2] A. Inoue, B. L. Shen, and R. Yavari, “Super-high strength of over 4000 MPa for Fe-based bulk glassy alloys in [(Fe_1-xCo_x)_0.75B_0.2Si_0.05]₉₆Nb₄ system,” Acta Mater., Vol.52, pp. 4093-4099, 2004.

[3] [3] K. Mondal, B. S. Murty, and U. K. Chatterjee, “Electrochemical behavior of amorphous and nanoquasicrystalline Zr-Pd and Zr-Pt alloys in different environment,” Corros. Sci., Vol.47, pp. 2619-2635, 2005.

[4] [4] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Thin Film Metallic Glass for MEMS and Precise Part,” Proc. Second TIT-BIT Joint Work Shop on Mech. Eng., pp. 62-67, Aug. 2007.

[5] [5] T. Fukushige, S. Hata, and A. Shimokohbe, “A MEMS conical spring actuator array,” Microelectromechnical System, Vol.14, pp. 243-253, 2005.

[6] [6] H.-W. Jeong, S. Hata, and A. Shimokohbe, “Microforming of three-dimensional micro structures from thin film metallic glass,” J. Microelectromech. Syst., Vol.12, pp. 42-52, 2003.

[7] [7] K. Takenaka, N. Saidoh, N. Nishiyama, and A. Inoue, “Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films,” Vol.22, 105302, 2011.

[8] [8] J. Sakurai, S. Hata, and A. Shimokohbe, “Reduction of Electrical Resistivity in PdCuSi Thin Film Metallic Glass,” Proc. Inter. Conf. on Advanced Technology in Experimental Mechanics 2003 (ATEM 2003), OS06W0457 (2003. 8. Nagoya, Japan).

[9] [9] S. Watanabe, J. Sakurai, and S. Hata, “Fabrication of Cu-Zr-Ti Thick Film Metallic Glass structure by Double Metal Mask Lift-off Process,” Microelectr. Engin., Vol.135, pp. 45-51, 2015.

[10] [10] J. Sakurai and S. Hata, “Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization,” Mat. Sci. Eng. A, Vol.541, pp. 8-13, 2012.

[11] [11] J. L. Murray, “Phase Diagram of Binary Titanium Alloys,” American Society for Metals, Metal Park, OH, p. 180, 1987.

[12] [12] H. Y. Kim, M. Mizutani, and S. Miyazaki, “Crystallization process and shape memory properties of Ti-Ni-Zr thin films,” Acta Mater., Vol.57, pp. 1920-1930, 2009.

[13] [13] Y. Liu, S. Hata, K. Wada, and A. Shimokohbe, “Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass,” Jpn., J. Appl. Phys., Vol.40, 5382-5388, 2001.

[14] [14] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System,” Jpn., J. Appl. Phys., Vol.48, 025503, 2009.