IJAT Vol.9 No.6 pp. 662-667
doi: 10.20965/ijat.2015.p0662


Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

Junpei Sakurai and Seiichi Hata

Graduate School of Engineering, Nagoya University
Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

July 23, 2015
October 8, 2015
November 5, 2015
microelectromechanical systems, metallic glasses, shape memory alloys, micro fabrication process

In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr content of more than 11 at.% undergo glass transitions and are TFMGs. The Ti39Ni50Zr11 TFMG has the lowest glass transition temperature Tg of 703 K and a wide supercooled liquid region ΔT of 57 K. Moreover, it has high thermal stability at Tg. However, the apparent viscosity of the Ti39Ni50Zr11 is higher than those of other Ti-Ni-Zr TFMGs. Moreover, the Ti-Ni-Zr TFMG exhibits higher viscosity than conventional TFMGs because the alloy composition of Ti-Ni-Zr TFMGs/SMAs is far from the eutectic point.

Cite this article as:
Junpei Sakurai and Seiichi Hata, “Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures,” Int. J. Automation Technol., Vol.9, No.6, pp. 662-667, 2015.
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