IJAT Vol.9 No.6 pp. 662-667
doi: 10.20965/ijat.2015.p0662


Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

Junpei Sakurai and Seiichi Hata

Graduate School of Engineering, Nagoya University
Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

July 23, 2015
October 8, 2015
November 5, 2015
microelectromechanical systems, metallic glasses, shape memory alloys, micro fabrication process
In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr content of more than 11 at.% undergo glass transitions and are TFMGs. The Ti39Ni50Zr11 TFMG has the lowest glass transition temperature Tg of 703 K and a wide supercooled liquid region ΔT of 57 K. Moreover, it has high thermal stability at Tg. However, the apparent viscosity of the Ti39Ni50Zr11 is higher than those of other Ti-Ni-Zr TFMGs. Moreover, the Ti-Ni-Zr TFMG exhibits higher viscosity than conventional TFMGs because the alloy composition of Ti-Ni-Zr TFMGs/SMAs is far from the eutectic point.
Cite this article as:
J. Sakurai and S. Hata, “Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures,” Int. J. Automation Technol., Vol.9 No.6, pp. 662-667, 2015.
Data files:
  1. [1] A. Inoue, W. Zhang, T. Zhang, and K. Kurosaka, “High-strength Cu-based bulk glassy alloys in Cu-Zr-Ti and Cu-Hf-Ti ternary systems,” Acta Mater., Vol.49, pp. 2645-2652, 2001.
  2. [2] A. Inoue, B. L. Shen, and R. Yavari, “Super-high strength of over 4000 MPa for Fe-based bulk glassy alloys in [(Fe1-xCox)0.75B0.2Si0.05]96Nb4 system,” Acta Mater., Vol.52, pp. 4093-4099, 2004.
  3. [3] K. Mondal, B. S. Murty, and U. K. Chatterjee, “Electrochemical behavior of amorphous and nanoquasicrystalline Zr-Pd and Zr-Pt alloys in different environment,” Corros. Sci., Vol.47, pp. 2619-2635, 2005.
  4. [4] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Thin Film Metallic Glass for MEMS and Precise Part,” Proc. Second TIT-BIT Joint Work Shop on Mech. Eng., pp. 62-67, Aug. 2007.
  5. [5] T. Fukushige, S. Hata, and A. Shimokohbe, “A MEMS conical spring actuator array,” Microelectromechnical System, Vol.14, pp. 243-253, 2005.
  6. [6] H.-W. Jeong, S. Hata, and A. Shimokohbe, “Microforming of three-dimensional micro structures from thin film metallic glass,” J. Microelectromech. Syst., Vol.12, pp. 42-52, 2003.
  7. [7] K. Takenaka, N. Saidoh, N. Nishiyama, and A. Inoue, “Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films,” Vol.22, 105302, 2011.
  8. [8] J. Sakurai, S. Hata, and A. Shimokohbe, “Reduction of Electrical Resistivity in PdCuSi Thin Film Metallic Glass,” Proc. Inter. Conf. on Advanced Technology in Experimental Mechanics 2003 (ATEM 2003), OS06W0457 (2003. 8. Nagoya, Japan).
  9. [9] S. Watanabe, J. Sakurai, and S. Hata, “Fabrication of Cu-Zr-Ti Thick Film Metallic Glass structure by Double Metal Mask Lift-off Process,” Microelectr. Engin., Vol.135, pp. 45-51, 2015.
  10. [10] J. Sakurai and S. Hata, “Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization,” Mat. Sci. Eng. A, Vol.541, pp. 8-13, 2012.
  11. [11] J. L. Murray, “Phase Diagram of Binary Titanium Alloys,” American Society for Metals, Metal Park, OH, p. 180, 1987.
  12. [12] H. Y. Kim, M. Mizutani, and S. Miyazaki, “Crystallization process and shape memory properties of Ti-Ni-Zr thin films,” Acta Mater., Vol.57, pp. 1920-1930, 2009.
  13. [13] Y. Liu, S. Hata, K. Wada, and A. Shimokohbe, “Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass,” Jpn., J. Appl. Phys., Vol.40, 5382-5388, 2001.
  14. [14] J. Sakurai, S. Hata, and A. Shimokohbe, “Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System,” Jpn., J. Appl. Phys., Vol.48, 025503, 2009.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Jun. 19, 2024