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IJAT Vol.9 No.5 pp. 482-486
doi: 10.20965/ijat.2015.p0482
(2015)

Paper:

Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer

Hirokazu Matsumoto*,** and Kiyoshi Takamasu*

*Department of Precision Engineering, The University of Tokyo
7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan

**Tokyo Seimitsu Co., Ltd.
4 Higashinakanuki-machi, Tsuchiura, Ibaraki 300-0006, Japan

Received:
March 20, 2015
Accepted:
April 13, 2015
Published:
September 5, 2015
Keywords:
length measurement, high repetition frequency, optical comb, absolute metrology
Abstract

The optical frequency comb has a short pulse, broad spectra, many spectral lines, and high temporal coherency. In this paper, a new absolute length-measuring technique with a high resolution of 0.05 μm is developed by using the temporal-coherence interferometry of the optical comb. A new fiber Fabry-Perot etalon (etalon) of a free spectral range with a frequency of 15 GHz is developed to improve fine positioning in space, so a short translation stage of up to a 10 mm movement is realized for various ranges of length. Moreover, the interference fringe peak is automatically detected by developing a new analog electrical circuit. The ambiguity of the interference-fringe orders is determined by using the etalon at a frequency 14.9 GHz within a time of 1 second for various length ranges.

Cite this article as:
H. Matsumoto and K. Takamasu, “Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer,” Int. J. Automation Technol., Vol.9, No.5, pp. 482-486, 2015.
Data files:
References
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Last updated on Dec. 10, 2019