Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer
Hirokazu Matsumoto*,** and Kiyoshi Takamasu*
*Department of Precision Engineering, The University of Tokyo
7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
**Tokyo Seimitsu Co., Ltd.
4 Higashinakanuki-machi, Tsuchiura, Ibaraki 300-0006, Japan
The optical frequency comb has a short pulse, broad spectra, many spectral lines, and high temporal coherency. In this paper, a new absolute length-measuring technique with a high resolution of 0.05 μm is developed by using the temporal-coherence interferometry of the optical comb. A new fiber Fabry-Perot etalon (etalon) of a free spectral range with a frequency of 15 GHz is developed to improve fine positioning in space, so a short translation stage of up to a 10 mm movement is realized for various ranges of length. Moreover, the interference fringe peak is automatically detected by developing a new analog electrical circuit. The ambiguity of the interference-fringe orders is determined by using the etalon at a frequency 14.9 GHz within a time of 1 second for various length ranges.
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