Modeling of Process Mechanisms in Pulsed Laser Micro Machining on Lithium Niobate Substrates
Teppei Onuki, Ippei Murayama, Hirotaka Ojima,
Jun Shimizu, and Libo Zhou
Ibaraki University, 4-12-1 Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan
The mechanism behind the laser ablation of LN is investigated using near infrared pico-second-pulsed laser. A model of the mechanism is developed, deriving the mechanical, thermal, and photonic properties of LN in addition to doing preliminary experiments on laser ablation with controlled laser fluence. β is material removal using the nonthermal process via multiphoton ionization, γ is nonthermal material removal with chipping or cracking produced by generated heat (but at temperatures below the melting point), and δ is material removal using the thermal process with temperatures above the melting point, resulting in resolidification at the surface and the adhesion of oncemolten burrs around the processed area. In a process modes map constructed through exhaustive experiments on laser ablation under various irradiation conditions (at specific energy ρ and with number of pulse shots N’), different contributions of ρ and N’ in the machining process are found. In terms of machining quality, desirable conditions in the control of laser irradiations are the use of weaker ρ and increased N’ to keep thermal damage to a minimum and to raise the removal rate.
Jun Shimizu, and Libo Zhou, “Modeling of Process Mechanisms in Pulsed Laser Micro Machining on Lithium Niobate Substrates,” Int. J. Automation Technol., Vol.8, No.6, pp. 896-902, 2014.
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