Development of a Non-RigidMicro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever
German Herrera-Granados*, Kiwamu Ashida**, Ichiro Ogura**,
Yuichi Okazaki**, Noboru Morita*, Hirofumi Hidai*,
Souta Matsusaka*, and Akira Chiba*
*Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi, Chiba 263-8522, Japan
**AMRI, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba-shi, Ibaraki 305-8564, Japan
A new cutting mechanism for the fabrication of microscale grooves is presented in this study. Based on the control principle of the nano-cutting mechanism using an Atomic Force Microscope (AFM), in the newly developed system, a single crystal diamond tool is mounted at the free edge of a cantilever beam and is used for the removal of material. During the cutting process, the cantilever undergoes a deformation that is required for the implementation of a machining force feedback control. It was experimentally observed that the use of this mechanism enables to maintain the cutting depth of the micro-grooves constant even if they are fabricated on inclined surfaces; this is achieved by maintaining the normal cutting force constant using a feedback controller. For this experimental system, an optical lever is used to measure the angular deformation at the tip of the cantilever, thus providing a better understanding of total cutting force involved in the machining process.
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