IJAT Vol.8 No.3 pp. 406-419
doi: 10.20965/ijat.2014.p0406


Feature-Based 3D Process Planning for MEMS Fabrication

Satoshi Kanai*, Takayuki Shibata**, and Takahiro Kawashima**

*Graduate School of Information Science and Technology, Hokkaido University, Kita-14, Nishi-9, Kita-ku, Sapporo 060-0814, Japan

**Department of Mechanical Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 441-8580, Japan

December 7, 2013
March 3, 2014
May 5, 2014
MEMS, surface micro machining, process planning, feature recognition, solid model
With the fast growth of the market forMEMS (Micro-Electro-Mechanical Systems) devices, Computer-Aided Design (CAD) and Computer-Aided Process Planning (CAPP) systems for MEMS are essential for the appropriate division of labor between MEMS design and fabrication. Although several CAD systems for MEMS devices are commercially available, CAPP systems for MEMS are still underdeveloped, and few systems have been investigated. The purpose of this study is to prototype a CAPP system for MEMS for non-expert MEMS designers. MEMS device geometry, a complex layered structure made of multiple materials, is represented as a solid model called a device model. The system has twomain functions. In processextraction function, all feasible fabrication processes of the device are exhaustively derived from the device model using 3D fabrication features as clues. In manufacturable-geometry-estimation function, the expected 3D geometry of the device that will actually be fabricated by the derived process, which might differ from the original device model, is estimated. Process emulation using a commercial emulator and examination by expert researchers confirm that the derived process plans and the expected 3D geometries of the device are feasible and plausible.
Cite this article as:
S. Kanai, T. Shibata, and T. Kawashima, “Feature-Based 3D Process Planning for MEMS Fabrication,” Int. J. Automation Technol., Vol.8 No.3, pp. 406-419, 2014.
Data files:
  1. [1] M. Gad-el-Hak, “Introduction (Chapter 1),” The MEMS Handbook. – MEMS Design and Fabrication (edited by M.Gad-el-Hak), Taylor & Fransis Group, pp. 1-1-1-5, 2006.
  2. [2] K. Ashida, S. Nakano, J. Park, and J. Akedo, “On-Demand MEMS Device Production System by Module-based Microfactory,” Int. J. of Automation Technology, Vol.4, No.2, pp. 110-116, 2010.
  3. [3] Micromachine Center, FY 2009 Reports on Research Studies, MicroNano, No.71, p. 8, 2009, [accessed Dec. 1, 2013]
  4. [4] P. M. Osternberg and S. D. Senturia, “MemsBuilder: An automated 3D solid model construction program for micro-electromechanical structures,” Proc. of 8th Int. Conf. on Solid-state Sensors and Actuators and EuroSensors IX, pp. 21-24, 1995.
  5. [5] H. Dixist, S. Kannapan, and D. L. Taylor, “3D geometric simulation of MEMS fabrication processes: A semantic approach,” Proc. of 4th ACM symp. on Solid Modeling and Application, pp. 376-386, 1997.
  6. [6] CoventorWare, [accessed Dec. 1, 2013]
  7. [7] H. Kotera, “Computer aided engineering systems forMicro Electro-Mechanical Systems -MEMS-One,” Proc. of Sens Symp Sens Micromachines Appl Sys, Vol.23, pp. 5-8, 2006.
  8. [8] S. A. Jawalkar and M. I. Campbell, “Automated synthesis ofMEMS fabrication sequences using graph grammars,” Proc. of ASME 2007 Int. Design Engineering Technical Conf., DETC2007-34691, 2007.
  9. [9] S. Cho, K. Lee, and T.W. Kim, “Development of a geometry-based process planning system for surface micromachining,” Int. J. of Production Research, Vol.40, No.5, pp. 1275-1293, 2002.
  10. [10] J. Li, S. Gao, and Y. Liu, “Solid-based CAPP for surface micromachined MEMS devices,” Computer-Aided Design, Vol.39, No.3, pp. 190-201, 2007.
  11. [11] T. Kitahara, S. Kanai, T. Shibara, and T. Kawashima, “Process planning system for MEMS device using a 3D geometric model,” Proc. of the 3rd Asian Scociety for Precision Engineering and Nanotechnology, 2E-11-1947, 2009.
  12. [12] J. Li, Y. Liu, H. Ling, W. Guo, and G. He, “Systematic Direct Solid Modeling Approach for Surface Micormachined MEMS,” Advanced Materials Research, Vols.433-440, pp. 3130-3137, 2012.
  13. [13] Z. Liu and H. Chen, “An Optimal Design Method based on Feature Technology for Micro Device,” Advanced Materials Research, Vols.383-390, pp. 440-446, 2012.
  14. [14] Z. Liu and H. Chen, “Voxel Primitive Based Modeling and Simulating Method for Surface Micromachining Technology,” J. of Software, Vol.8, No.11, pp. 2881-2889, 2013.
  15. [15] C.W. Hunter, J. C. Xu, C. C. Liu, and D. B. Makel, “Electrochemical Cell Oxygen Detection (Section 11.4.3),” TheMEMS Handbook – MEMS Design and Fabrication, M.Gad-el-Hak (Ed.), Taylor & Fransis Group, pp. 11-13-11-15, 2006.

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