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IJAT Vol.8 No.2 pp. 275-281
doi: 10.20965/ijat.2014.p0275
(2014)

Paper:

Effect of Tool Run-Out on Micro-Groove Milling for a Microchannel Die

Kenichi Iwatsuka*, Yukio Maeda*, Takanori Yazawa**,
and Shinya Suzuki***

*Toyama Prefectural University, 5180 Kurokawa, Imizu-shi, Toyama 939-0398, Japan

**Nagasaki University, 1-14 Bunkyo-machi, Nagasaki-shi, Nagasaki 852-8521, Japan

***Nagano National College of Technology, 716 Tokuma, Nagano-shi, Nagano 381-8550, Japan

Received:
September 17, 2013
Accepted:
February 5, 2014
Published:
March 5, 2014
Keywords:
cutting, milling, microchannel chip die, cutting force, tool run-out
Abstract

Recently, the use of microchannel chips in micro total analysis systems, which can provide savings of natural resources and energy, has attracted attention in the medical field. Generally, the photolithography technology used in semiconductor manufacturing is used to manufacture microchannel chip dies. However, it involves several processes such as mask fabrication and the application of a photoresist to Si substrate, as well as expensive clean room facilities. In light of this, methods to form a fine groove using a micro-endmill are examined. The effects of the tool run-out of a few micrometers on micro-endmilling, as well as on the groove accuracy of a microgroove, are examined.

Cite this article as:
K. Iwatsuka, Y. Maeda, T. Yazawa, and <. Suzuki, “Effect of Tool Run-Out on Micro-Groove Milling for a Microchannel Die,” Int. J. Automation Technol., Vol.8, No.2, pp. 275-281, 2014.
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Last updated on Dec. 13, 2018