single-au.php

IJAT Vol.7 No.2 pp. 156-162
doi: 10.20965/ijat.2013.p0156
(2013)

Paper:

Views over last 60 days: 711

Development of a Non-Contact Focusing Probe for the Measurement of Micro Cavities

Kuang-Chao Fan*,**, Ke Zhang*, You-Liang Zhang*,
and Qing Zhang*

*School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, 193 Tunxi Rd, Hefei, 230009, China

**Department of Mechanical Engineering, National Taiwan University, 1, Sec. 4, Roosevelt Rd., Taipei, 10617, Taiwan

Received:
December 1, 2012
Accepted:
February 7, 2013
Published:
March 5, 2013
Creative Commons License
Keywords:
micro cavity detection, blue-ray pick-up head, non-contact measurement, nano-positioning stage
Abstract

The measurement of microcavities is a challenging task if the cavity is smaller than the diameter of the micro touch-trigger probe. This paper presents a noncontact method using a blue-ray DVD pickup head as the sensor. It is based on a focusing principle holding that reflected light intensity is maximal when the tested surface is at the focus point of the probe. When a focused beam scans the edge of the cavity, reflected light intensity is gradually reduced. Theoretical analysis is used to derive the light intensity equation for when the focused beam is passing along the edge. Experimental tests of the developed probe were carried out in association with a nanopositioning stage. The edge position is obtained up to a resolution of 1 nm and a standard deviation of about 30 nm. This performance is beyond the diffraction limit of optical microscopes.

Cite this article as:
K. Fan, K. Zhang, Y. Zhang, and <. Zhang, “Development of a Non-Contact Focusing Probe for the Measurement of Micro Cavities,” Int. J. Automation Technol., Vol.7, No.2, pp. 156-162, 2013.
Data files:
References
  1. [1] B. Kim, T. Masuzawa, and T. Bourouina, “The vobroscanning method for the measurements of micro-hole profile,” Measurement Science & Technology, Vol.10, pp. 697-705, 1999.
  2. [2] B. Muralkrishnan, J. A. Stone, and J. R. Stoup, “Diameter and form measurement of micro-hole in a fuel injection nozzle with the NIST fiber probe,” Proc. of ASPE Annual meeting, Monterey Canada, 2009.
  3. [3] S. Cho and H. Thielecke, “Micro hole-based cell chip with impendence spectroscopy,” Biosensors and Bioelectronics, Vol.22, pp. 1764-1768, 2007.
  4. [4] T. Y. Chen, Y. S. Liao, and W. C. Liu, “Development of a micro hole measuring system with capacitance principle,” Measurement Science & Technology, Vol.20, 105104, pp. 1-6, 2009.
  5. [5] C. H. Lin, R. A. Powell, L. Jiang, H. Xiao, et al, “Real-time depth measurement for micro-holes drilled by lasers,” Measurement Science & technology, Vol.21, 025307, pp. 1-6, 2010.
  6. [6] A. Weckenmann, G. Peggs, and J. Hoffmann, “Probing systems in micro- and nano-metrology,” Measurement Science & Technology, Vol.17, pp. 504-509, 2006.
  7. [7] C. L. Chu and C. Y. Chiu, “Development of a low cost nanoscale touch trigger probe based on two commercial DVD pick-up head,” Meas. Sci. Technol., Vol.18, 1831-1842, May. 2007, doi:10.1088/0957-0233/18/7/006.
  8. [8] R. J. Li, K. C. Fan, S. Tao, J. Z. Qian, Q. X. Huang, and F. Cheng, “Design of Analogue Contact Probe for Nano-Coordinate Measurement Manchines,” Proc. Of SPIE, Vol.8321, 832114-1, 2011.
  9. [9] K. C. Fan, C. Y. Lin, and L. H. Shyu, “Development of a Low-cost Focusing probe for Profile Measurement,” Measurement Science & Technology, Vol.11, No.1, pp. 1-7, 2000.

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Mar. 29, 2023