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IJAT Vol.7 No.2 pp. 148-155
doi: 10.20965/ijat.2013.p0148
(2013)

Paper:

Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating

Ryogen Fujiwara*, Tadahiko Shinshi*, and Minoru Uehara**

*Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan

**Hitachi Metals, Ltd., 2-15-17 Egawa, Shimamoto-cho, Mishima-gun, Osaka 618-0013, Japan

Received:
December 10, 2012
Accepted:
January 13, 2013
Published:
March 5, 2013
Keywords:
electromagnetic actuator, linear motor, MEMS, thin film permanent magnet, positioning, DLC coating
Abstract

A high performance Nd2Fe14B/Ta thin film Permanent Magnet (PM) not only has a high remnant flux density and a high coercive force similar to those of a conventional sintered Nd2Fe14B magnet, but also has a high heat tolerance. Using a thin film PM, we developed a moving-magnet typeMEMS linearmotor consisting of a silicon slider including a multi-pole magnetized thin film PM, a linear guideway made from silicon, and a two-phase micro-coil. Diamond-Like Carbon (DLC) coatings were used in order to reduce the friction force between the slider and the guideway. The purpose of this study is to realize feedback positioning of the MEMS linear motor and to investigate the dynamics of the linear motor system. In a driving experiment, the minimum current and voltage to start the slider were less than 0.26 A and 0.6 V, respectively. In positioning tests, the positioning resolution and bandwidth were 100 µm and 54 Hz, respectively.

Cite this article as:
R. Fujiwara, T. Shinshi, and M. Uehara, “Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating,” Int. J. Automation Technol., Vol.7, No.2, pp. 148-155, 2013.
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Last updated on Dec. 10, 2019