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IJAT Vol.5 No.6 pp. 809-822
doi: 10.20965/ijat.2011.p0809
(2011)

Paper:

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Modelling and Control of Flexure Mechanism Driven by Electromagnetic Linear Motors for Ultraprecise Continuous Path Positioning over a One-Millimetre Stroke

Shigeo Fukada*, Kentaro Nishimura**,
and Tomoaki Matsuda***

*Department of Mechanical Systems Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan

**Production Machinery Development Engineer, ROHM Co., Ltd., 21 Saiin Mizosaki-cho, Ukyo-ku, Kyoto 615-8585, Japan

***Aerospace Engineering, Oye headquarters, Churyo Engineering Corporation, 10, Oye-cho, Minato-ku, Nagoya, Aichi 455-8515, Japan

Received:
April 5, 2011
Accepted:
September 15, 2011
Published:
November 5, 2011
Creative Commons License
Keywords:
ultraprecise positioning, circular motion, nanometric resolution, flexure mechanism, linear motor
Abstract
The topic discussed is the Continuous-Path (CP) control performance of a planar positioning mechanism with three degrees of freedom using flexure guides and electromagnetic linear motors. A stage of cube configuration with 60 mm sides is supported by leaf springs made of phosphor bronze, which form double compound rectilinear springs with three degrees of freedom. Three pairs of VCM-type linear motors are set around the stage, and laser interferometers with a resolution of 0.6 nm measures the stage motion in the X-Y-θ directions. To achieve ultraprecise CP positioning, a dynamic model is derived from the equations of motion of the mechanism, and a simulation system is constructed to demonstrate the dynamic performance of the developed positioning system. Some experiments are performed to evaluate the performance of the control methods to obtain high-precision circular motion. The simulation system reproduces the performance in single-axis positioning. The multiaxis control is affected by interference among the axes X-Y-θ. To eliminate the interference, the input-output property of the mechanismconsidered as a Multiple-Input Multiple-Output (MIMO) system is measured in quasi-static and dynamic domains, and a static inverse model of the MIMO system is adopted for a FeedForward (FF) controller. Fine circularmotion with a roundness of 66 nm and a tracking deviation of 20 nm is achieved over a 1-mm stroke, and thus, the potential of the mechanism is demonstrated.
Cite this article as:
S. Fukada, K. Nishimura, and T. Matsuda, “Modelling and Control of Flexure Mechanism Driven by Electromagnetic Linear Motors for Ultraprecise Continuous Path Positioning over a One-Millimetre Stroke,” Int. J. Automation Technol., Vol.5 No.6, pp. 809-822, 2011.
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References
  1. [1] Edited by the Technical Committee of Ultra Precision Positioning, JSPE, “Present and Future Technology of Ultraprecision Positioning,” Fuji Techno System, pp. 658-663, 2000. (in Japanese)
  2. [2] M. Holmes, D. Trumper, “Magnetic/fluid-bearing stage for atomicscale motion control (the angstrom stage),” Precision Engineering, Vol.18, No.1, pp. 38-49, 1996.
  3. [3] A.D.Mazzeo, A.J. Stein, D.L. Trumper, R.J. Hocken, “Atomic force microscope for accurate dimensional metrology,” Precision Engineering, Vol.33, pp. 135-149, 2009.
  4. [4] B. Poyet, S. Ducourtieux, J. David, L. Lahousse, S. Leleu, “Development of a new XY flexure translation stage with high guidance quality for the LNE metrological AFM,” Proc. euspen 10th Int. Conf., Vol.2, pp. 375-377, 2008.
  5. [5] M. N. M. Zubir, B. Shirinzadeh, “Development of a high precision flexure-based microgripper,” Precision Engineering, Vol.33, pp. 362-370, 2009.
  6. [6] C. Chu, S. Fan, “A novel long-travel piezoelectric-driven linear nanopositioning stage,” Precision Engineering, Vol.30, pp. 85-95, 2006.
  7. [7] Q. Yao, J. Dong, P. M. Ferreira, “A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning (Part 1. Kinematics and design for fabrication),” Precision Engineering, Vol.32, pp. 7-19, 2008.
  8. [8] Q. Yao, J. Dong, P.M. Ferreira, “A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning (Part 2. Dynamics, control and performance analysis),” Precision Engineering, Vol.32, pp. 20-33, 2008.
  9. [9] S. Awtar, A. H. Slocum, “Constraint-based design of parallel kinematic XY flexure mechanisms,” Trans. ASME, J. Mechanical Design, Vol.129, pp. 816-830, 2007.
  10. [10] S. Fukada, S. Hirano, “Nanometric positioning with three Degrees of Freedom over a one-millimeter stroke using flexure guide and electromagnetic linear motor,” Proc. euspen 4th Int. Conf., pp. 238-239, 2004.
  11. [11] S. Fukada, K. Nishimura, “Nanometric positioning over a onemillimeter stroke using flexure guide and electromagnetic linear motor,” Int. J. of Precision Engineering and Manufacturing, Vol.8, No.2, pp. 49-53, 2007.
  12. [12] S. T. Smith, D. G. Chetwynd, “Foundation of Ultraprecision Mechanism Design,” Gordon and Breach Science Publishers, 1994.
  13. [13] S. T. Smith, R.M. Seugling, “Sensor and actuator considerations for precision, small machines,” Precision Engineering, Vol. 30, pp.245-264, 2006.
  14. [14] L. Jabben, D. L. Trumper, J. van Eijk, “Dynamic error budgeting - an integral system design approach for high precition machines,” Proc. euspen 10th Int. Conf., Vol. 1, pp. 363-367, 2008.

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