Trajectory Control of Pneumatic Servo Table with Air Bearing
Jun Li*, Kotaro Tadano*, Kenji Kawashima*,
Toshinori Fujita**, and Toshiharu Kagawa*
*Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503, Japan
**Tokyo Denki University, 2-2 Kanda-nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan
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