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IJAT Vol.5 No.3 pp. 395-402
doi: 10.20965/ijat.2011.p0395
(2011)

Paper:

Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle

Yasuhiro Takaya, Masaki Michihata, and Terutake Hayashi

Department of Mechanical Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

Received:
January 31, 2011
Accepted:
March 6, 2011
Published:
May 5, 2011
Keywords:
displacement sensor, localized interference scale, radiation pressure, microprobe, microparts
Abstract

The new scanning type microprobe, based on a standing wave pattern as the interferometric scale and an optically trapped microprobe as the sensing probe to read the scale, is proposed. To confirm the measurement principle the fundamental investigation was conducted experimentally and the properties such as the accuracy, the resolution and the measurable range are evaluated. The feasibility as amicro-displacement sensor is indicated by measurement results of a silicon wafer surface and a silicon sphere. In order to investigate the ability of three-dimensional measurement the scanning measurement of a micro spherical lens with a diameter of 2 mm is carried out.

Cite this article as:
Y. Takaya, M. Michihata, and T. Hayashi, “Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle,” Int. J. Automation Technol., Vol.5, No.3, pp. 395-402, 2011.
Data files:
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Last updated on Nov. 08, 2019