IJAT Vol.3 No.3 pp. 257-262
doi: 10.20965/ijat.2009.p0257


Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication

Young Jin Noh, Masayuki Nagashima, Yoshikazu Arai, and Wei Gao

Nanometrology and Control Laboratory, Department of Nanomechanics, Tohoku University
6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan

January 27, 2009
April 2, 2009
May 5, 2009
fast tool positioning, voice coil actuator, micro-lens, diamond turning machine

This paper describes the design, characteristics evaluation and experiment of a fast tool positioning (FTP) unit driven by a voice coil actuator. Three types of springs for coupling the actuator and the cutting tool, are compared for displacement constant, stiffness, and dynamic response based results of theoretical analysis and experiments. Micro-lens fabrication experiments on an aluminum alloy workpiece are conducted using the FTP with a disc spring, which has a displacement constant of approximately 100 μm/A, a bandwidth of approximately 273 Hz, and a Z direction stiffness of 210 mN/μm.

Cite this article as:
Y. Noh, M. Nagashima, Y. Arai, and W. Gao, “Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication,” Int. J. Automation Technol., Vol.3, No.3, pp. 257-262, 2009.
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