IJAT Vol.3 No.3 pp. 249-256
doi: 10.20965/ijat.2009.p0249


Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning

Masato Kadotani*1, Takakazu Kitagawa*1, Satoshi Katto*1, Tomoko Hirayama*2, Takashi Matsuoka*2, Hiroshi Yabe*3, and Katsumi Sasaki*4

*1Graduate School of Mechanical Engineering, Doshisha University
1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan

*2Department of Mechanical Engineering, Doshisha University

*3Kyoto University, Osaka Electro-Communication University

*4Pneumatic Servo Controls Ltd.

February 13, 2009
April 13, 2009
May 5, 2009
aerostatic bearing, pneumatic servo technology, actuator, nanometer positioning, feedback control, parallel observer
The ‘pneumatic servo bearing actuator (PSBA)’ that consists of an aerostatic bearing and a servo valve was proposed and developed for ultraprecise positioning. In the actuator, pressurized air controlled by the servo valve moves an actuated spool ultra-precisely. Even under open-loop control, the PSBA provided accurate replication and positioning resolution on a nanometer order. Applying simple positioning feedback and parallel observation that estimates the disturbance into the system increased the actuator stiffness to be almost infinite and promoted a sharp step response without drift and hysteresis, and thus the minimum positioning resolution of prototype PSBA was about 1 nm.
Cite this article as:
M. Kadotani, T. Kitagawa, S. Katto, T. Hirayama, T. Matsuoka, H. Yabe, and K. Sasaki, “Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning,” Int. J. Automation Technol., Vol.3 No.3, pp. 249-256, 2009.
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Last updated on Jul. 12, 2024