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IJAT Vol.3 No.3 pp. 249-256
doi: 10.20965/ijat.2009.p0249
(2009)

Paper:

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Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning

Masato Kadotani*1, Takakazu Kitagawa*1, Satoshi Katto*1, Tomoko Hirayama*2, Takashi Matsuoka*2, Hiroshi Yabe*3, and Katsumi Sasaki*4

*1Graduate School of Mechanical Engineering, Doshisha University
1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan

*2Department of Mechanical Engineering, Doshisha University

*3Kyoto University, Osaka Electro-Communication University

*4Pneumatic Servo Controls Ltd.

Received:
February 13, 2009
Accepted:
April 13, 2009
Published:
May 5, 2009
Creative Commons License
Keywords:
aerostatic bearing, pneumatic servo technology, actuator, nanometer positioning, feedback control, parallel observer
Abstract
The ‘pneumatic servo bearing actuator (PSBA)’ that consists of an aerostatic bearing and a servo valve was proposed and developed for ultraprecise positioning. In the actuator, pressurized air controlled by the servo valve moves an actuated spool ultra-precisely. Even under open-loop control, the PSBA provided accurate replication and positioning resolution on a nanometer order. Applying simple positioning feedback and parallel observation that estimates the disturbance into the system increased the actuator stiffness to be almost infinite and promoted a sharp step response without drift and hysteresis, and thus the minimum positioning resolution of prototype PSBA was about 1 nm.
Cite this article as:
M. Kadotani, T. Kitagawa, S. Katto, T. Hirayama, T. Matsuoka, H. Yabe, and K. Sasaki, “Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning,” Int. J. Automation Technol., Vol.3 No.3, pp. 249-256, 2009.
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