Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning
Masato Kadotani*1, Takakazu Kitagawa*1, Satoshi Katto*1, Tomoko Hirayama*2, Takashi Matsuoka*2, Hiroshi Yabe*3, and Katsumi Sasaki*4
*1Graduate School of Mechanical Engineering, Doshisha University
1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan
*2Department of Mechanical Engineering, Doshisha University
*3Kyoto University, Osaka Electro-Communication University
*4Pneumatic Servo Controls Ltd.
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