Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication
Young Jin Noh, Masayuki Nagashima, Yoshikazu Arai, and Wei Gao
Nanometrology and Control Laboratory, Department of Nanomechanics, Tohoku University
6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan
This paper describes the design, characteristics evaluation and experiment of a fast tool positioning (FTP) unit driven by a voice coil actuator. Three types of springs for coupling the actuator and the cutting tool, are compared for displacement constant, stiffness, and dynamic response based results of theoretical analysis and experiments. Micro-lens fabrication experiments on an aluminum alloy workpiece are conducted using the FTP with a disc spring, which has a displacement constant of approximately 100 μm/A, a bandwidth of approximately 273 Hz, and a Z direction stiffness of 210 mN/μm.
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