single-au.php

IJAT Vol.3 No.3 pp. 241-248
doi: 10.20965/ijat.2009.p0241
(2009)

Paper:

Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways

Jiro Otsuka*, Toshiharu Tanaka**, and Ikuro Masuda***

*Department of Mechanical Engineering, Faculty of Science and Technology, Shizuoka Institute of Science and Technology
2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan

**Department of Mechanical Engineering, Toyota National College of Technology
2-1 Eisei, Toyota, Aichi 471-8525, Japan

***Shizuoka Institute of Science and Technology
2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan

Received:
January 20, 2009
Accepted:
February 22, 2009
Published:
May 5, 2009
Keywords:
sub-nanometer positioning, linear motor, linear motion ball guide way, positioning accuracy, step response
Abstract

A new type of linear motor described in this paper has some advantages compared with the usual types of motors. The attractive magnetic force between the stator (permanent magnets) and mover (armature) is diminished almost to zero. The efficiency is better because the magnetic flux leakage is very small, the size of motor is smaller and detent (force ripple) is smaller than the general motors. Therefore, we think that this motor is greatly suitable for ultra-precision positioning as an actuator. An ultra-precision positioning device using this motor and liner motion ball guide ways is newly developed. Moreover, the positioning performance is evaluated by a positioning resolution, deviational and dispersion errors. As the results of repeated step response tests, the positioning resolution is 0.3 nm, the deviational error is -0.001nm and the dispersion error (3σ) is 0.29 nm. Consequently, the positioning device achieves sub-nanometer positioning. In addition, very large rigidity can be achieved.

Cite this article as:
J. Otsuka, T. Tanaka, and I. Masuda, “Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways,” Int. J. Automation Technol., Vol.3, No.3, pp. 241-248, 2009.
Data files:
References
  1. [1]M. Toriumi, “Positioning Techniques in Semiconductor Manufacturing Equipment,” Journal of the Japan Society for Precision Engineering, Vol.57, No.10, pp. 1726-1730, 1991 (in Japanese).
  2. [2]S. Wakui, “Current and Future of Precision Positioning Stage Working in Stepper,” Journal of the Japan Society for Precision Engineering, Vol.67, No.2, pp. 202-206, 2001 (in Japanese).
  3. [3]H. Mizumoto, K. Nomura, T. Matsubara, and Y. Makimoto, “A Precision Positioning System Using a Twist-Roller Friction Drive,” Journal of the Japan Society for Precision Engineering, Vol.57, No.8, pp. 1468-1473, 1991 (in Japanese).
  4. [4]Y. Ito et al., “Ultraprecision Positioning of Sub-nanometer Resolution Using New Type of Linear Motor,” Proc. 3rd Int. Conf. of Positioning Technology (ICPT 2008), pp. 283-284, 2008.
  5. [5]S. Futami and A. Furutani, “Nanometer Positioning Using AC Linear Motor and Rolling Guide (1st Report),” Journal of the Japan Society for Precision Engineering, Vol.57, No.3, pp. 556-561, 1991 (in Japanese).
  6. [6]J. Otsuka, S. Ichikawa, and Y. Yamaguchi, “Development of Small Ultraprecision Displacement Sensor and Small Ultraprecision Positioning Device with 1 nm Resolution,” Journal of the Japan Society for Precision Engineering, Vol.69, No.10, pp. 1428-1433, 2003 (in Japanese).
  7. [7]T. Oiwa and M. Katsuki, “Survey of Questionnaire on Ultra-precision Positioning,” Journal of the Japan Society for Precision Engineering, Vol.69, No.8, pp. 1077-1082, 2003 (in Japanese).
  8. [8]H. -J. Kim, J. Nakatsugawa, K. Sakai, and H. Shibata, “High-Acceleration Linear Motor, “Tunnel Actuator”,” Journal of the Magnetics Society of Japan, Vol.29, No.3, pp. 199-204, 2005 (in Japanese).
  9. [9]N. Suda, “PID Control,” Asakushoten, p. 39, 1992 (in Japanese).
  10. [10]T. Tanaka, T. Oiwa, and J. Otsuka, “Study on Friction Model of Linear Ball Guideway for Precision Positioning Control (2nd Report),” Journal of the Japan Society for Precision Engineering, Vol.73, No.4, pp. 465-469, 2007 (in Japanese).

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, IE9,10,11, Opera.

Last updated on Nov. 19, 2019