Application of Robust Control Law for Linear Slider
Satoshi Yamamoto and Shinji Wakui
Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganeishi, Tokyoto 184-8588, Japan
The most important specifications in precision positioning are positioning accuracy and settling time. When a positioning sensor based on required specifications is installed in equipment, every effort is made to realize throughput, i.e., high-speed positioning. We applied model-matching 2-degree-of-freedom (DOF) control to a linear slider to realize positioning, but found that positioning waveforms were uneven under different conditions. To overcome this problem, we applied robust control laws, e.g., MM-2DOF with a disturbance observer, robust 2DOF control, and modelfollowing 2DOF control to the linear slider. A comparative study confirmed experimentally that robust 2DOF control was most suitable. To improve modelfollowing 2DOF control, we modified model-following 2DOF control and its robust positioning.