Effect of Servo Valve Dynamic on Precise Position Control of a Pneumatic Servo Table
Toshinori Fujita* , Kenji Kawashima** , Takashi Miyajima** , Taro Ogiso** , and Toshiharu Kagawa**
*Tokyo Denki University, 2-2, Nishiki-cho Kanda, Chiyoda-ku, Tokyo, Japan
**Tokyo Institute of Technology, 4259 R2-46, Midori-Ku, Nagatuta, Yokohama, Kanagawa, Japan
In experimentally investigating the effect of servo valve dynamics on control of a pneumatic servo table with an air bearing, we propose control using a PDD2 and a feedforward controller, then test step and trajectory tracking response with natural servo valve frequencies. We confirmed that pneumatic servo performance is affected by servo valve dynamics. We found that tracking error fell below +- 0.5 mm when the servo valve has a natural frequency of 300 Hz.