Nanoprecision Micromechanical Fabrication
Hitoshi Ohmori* , Weimin Lin** , Yoshihiro Uehara* , Yutaka Watanabe* , Shin-ya Morita* , Toru Suzuki*** , and Kazutoshi Katahira*
*RIKEN (The Institute of Physical and Chemical Research), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
**Dept. of Machine Intelligence and Systems Engineering, Faculty of Systems Science and Technology, Akita Prefectural University, 84-4 Tsuchiya-Ebinokuchi, Yurihonjo, Akita 015-0055, Japan
***MONOTSUKURI TRAINING CENTER (R&D), 707-4 Tokorokuki, Kuki-City, Saitama 346-0034, Japan
ELID grinding is a method that realizes high quality mirror surface grinding in the nanometer order by use of electrolytic dressing metal bonded wheels consisting of fine abrasives. Currently, ELID grinding is increasingly being applied as an ultraprecision grinding method to achieve desired surface roughness, high surface accuracy, high surface quality, and high grinding performance. This paper introduces the ELID grinding and discusses some applications of ELID grinding to mirror surface grinding. For ultraprecision optical components, ultra fine smooth surface quality of sub-nanometer or sub-angstrom in Ra may be required. To satisfy these requirements, ultraprecision on machine measurement system had been developed. Synergistic the nano precision mechanical method, nano precision measurement method with nano resolution machine, the ultraprecision components can successful to fabricate.