Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings
Hayato Yoshioka*, Toshimichi Gokan**, and Hidenori Shinno*
*Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan
**Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
As the need to develop high-performance highly accurate positioning has grown in a wide range of industries, it has become necessary to comprehensively study desirable stage positioning systems based on new design concepts. Achieving nanometer positioning requires simultaneous noncontact drive and support of the moving stage. We developed a linear motordriven stage positioning system with squeeze bearings and evaluated squeeze bearing and positioning performance of the proposed positioning system through a series of actual stage driving experiments that confirmed the stage’s nanopositioning capability.