JRM Vol.32 No.2 pp. 344-350
doi: 10.20965/jrm.2020.p0344


High-Speed and Large-Amplitude Resonant Varifocal Mirror

Takashi Sasaki, Takuro Kamada, and Kazuhiro Hane

Tohoku University
6-6-01 Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan

October 22, 2019
January 23, 2020
April 20, 2020
micro mirrors, varifocal mirrors, high-quality factor, support loss, laser scanning

We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.

Front (left fig.) and back (right fig.) of the fabricated node supported varifocal mirror

Front (left fig.) and back (right fig.) of the fabricated node supported varifocal mirror

Cite this article as:
T. Sasaki, T. Kamada, and K. Hane, “High-Speed and Large-Amplitude Resonant Varifocal Mirror,” J. Robot. Mechatron., Vol.32 No.2, pp. 344-350, 2020.
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