JRM Vol.32 No.2 pp. 315-322
doi: 10.20965/jrm.2020.p0315


Development of MEMS Tactile Sensation Device for Haptic Robot

Junji Sone*, Yasuyoshi Matsumoto*, Yoji Yasuda*, Shoichi Hasegawa**, and Katsumi Yamada*

*Tokyo Polytechnic University
1583 Iiyama, Atsugi, Kanagawa 243-0297, Japan

**Precision and Intelligence Laboratory, Tokyo Institute of Technology
4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503, Japan

September 4, 2019
December 23, 2019
April 20, 2020
MEMS device, tactile sensation, haptic sensation robot
Development of MEMS Tactile Sensation Device for Haptic Robot

It represents force and tactile information

A tactile sensation device using micro-electromechanical system (MEMS) has been developed. This device is integrated with a haptic sensation robot for use as fingers. The tactile device must be miniaturized to enable attachment of the actuator mechanism to the fingers. Therefore, we used MEMS technology for this device. The device is composed of an interface part fabricated by 3D printing, pins, and MEMS cantilever-type actuators. It has the ability to stimulate the mechanoreceptors of the fingertips. The device and robot can display not only high-resolution images of the fingertips but also the repulsion force during finger operations such as tool holding and rotation. We have not yet achieved the final device because of fabrication problems. In this paper, we explain the details, progress of development, and results of trials on the prototype device.

Cite this article as:
J. Sone, Y. Matsumoto, Y. Yasuda, S. Hasegawa, and K. Yamada, “Development of MEMS Tactile Sensation Device for Haptic Robot,” J. Robot. Mechatron., Vol.32, No.2, pp. 315-322, 2020.
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Last updated on Sep. 24, 2020