JRM Vol.23 No.3 pp. 426-433
doi: 10.20965/jrm.2011.p0426


Maskless Gray Scale Lithography and its 3D Microfluidic Applications

Yoko Yamanishi*1, Takuma Nakano*2, Yu Sawada*3,
Kazuyoshi Itoga*4, Teruo Okano*4, and Fumihito Arai*5

*1JST PRESTO, Department of Mechanical Science & Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

*2Japan Society for the Promotion of Science (JSPS), Japan

*3Kyoto University, Japan

*4Tokyo Women’s University, Japan

*5Nagoya University, Japan

October 29, 2010
April 13, 2011
June 20, 2011
grayscale lithography, three-dimensional photolithography, microTAS, micro-valve, cell manipulation

This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 µm. The 3D microvalve prevents liquid leakage when the membrane is closed – difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

Cite this article as:
Yoko Yamanishi, Takuma Nakano, Yu Sawada,
Kazuyoshi Itoga, Teruo Okano, and Fumihito Arai, “Maskless Gray Scale Lithography and its 3D Microfluidic Applications,” J. Robot. Mechatron., Vol.23, No.3, pp. 426-433, 2011.
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