JRM Vol.21 No.5 pp. 635-641
doi: 10.20965/jrm.2009.p0635


Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

Yuuka Irie*, Hisayuki Aoyama*, Junichi Kubo**, Takahiro Fujioka**, and Takashi Usuda***

*The University of Electro-Communications
1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

**Opto-Module R and D Section, New Business Development Department, Nalux Co.,Ltd.
2-1-7 Yamazaki, Shimamoto-cho, Mishima-gun, Osaka 618-0001, Japan

***National Metrology Institute Japan (NMIJ), Advanced Industrial Science and Technology (AIST)
1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

May 25, 2009
August 25, 2009
October 20, 2009
piezoelectric actuator, v-shaped groove guide, minute parts, inertia drive
This paper details the development of an inertia-driven X-Y microstage and simple gripper for a pick-up lens in Blu-ray disc alignment incorporating inertia-driven microsliders on V-shaped grooves and a micropart handler. The microslider is driven by impact generated by a mass connected with a piezo element. We made a kinematic model for theoretical analysis on the X-Y microstage and gave the microinertia X-Y stage a sophisticated design.The X stage is stacked on the Y stage to provide fine in-plane positioning. Practical applications include multiple lens component assembly in which the optical lens must be centered within a tolerance of less than 100 nm. Experiments confirmed successful achievement of this microlens positioning in the center of the reference lens axis as observed by the laser interference fringe.
Cite this article as:
Y. Irie, H. Aoyama, J. Kubo, T. Fujioka, and T. Usuda, “Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment,” J. Robot. Mechatron., Vol.21 No.5, pp. 635-641, 2009.
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