Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment
Yuuka Irie*, Hisayuki Aoyama*, Junichi Kubo**, Takahiro Fujioka**, and Takashi Usuda***
*The University of Electro-Communications
1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan
**Opto-Module R and D Section, New Business Development Department, Nalux Co.,Ltd.
2-1-7 Yamazaki, Shimamoto-cho, Mishima-gun, Osaka 618-0001, Japan
***National Metrology Institute Japan (NMIJ), Advanced Industrial Science and Technology (AIST)
1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
This paper details the development of an inertia-driven X-Y microstage and simple gripper for a pick-up lens in Blu-ray disc alignment incorporating inertia-driven microsliders on V-shaped grooves and a micropart handler. The microslider is driven by impact generated by a mass connected with a piezo element. We made a kinematic model for theoretical analysis on the X-Y microstage and gave the microinertia X-Y stage a sophisticated design.The X stage is stacked on the Y stage to provide fine in-plane positioning. Practical applications include multiple lens component assembly in which the optical lens must be centered within a tolerance of less than 100 nm. Experiments confirmed successful achievement of this microlens positioning in the center of the reference lens axis as observed by the laser interference fringe.
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