Fabrication of FIB-CVD Nanotemperature Sensor Probe for Local Temperature Sensing in Water Environments
Haitham ElShimy*, Masahiro Nakajima*, Yoshiaki Imaizumi*,
Fumihito Arai**, and Toshio Fukuda*
*Department of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan
**Department of Bioengineering and Robotics, Tohoku University, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan
We fabricated a nanotemperature sensor probe using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope (AFM) cantilevers, to be used in local sensing temperature distribution in local area. We present the fabrication approach & modifications for making this sensor probe capable of sensing temperature distributions not only in air but in water environment as well. The sensor probe was calibrated in water using the hot stage of an environmental scanning electron microscope (ESEM). Experimental results demonstrated positive characteristics of the temperature coefficient of resistance (TCR). We also illustrate the response of the sensor to sudden changes in surrounding media. The characteristics of this sensor probe were compared to previously reported temperature sensing devices. The comparison verifies that our sensor is relatively uncomplicated and reliable in fabrication. The capability of sensing temperature in water enables our sensor to be used in a wide range of bio-applications, especially in studying single-cell thermogenesis.
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