Paper:
Fabrication of FIB-CVD Nanotemperature Sensor Probe for Local Temperature Sensing in Water Environments
Haitham ElShimy*, Masahiro Nakajima*, Yoshiaki Imaizumi*,
Fumihito Arai**, and Toshio Fukuda*
*Department of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan
**Department of Bioengineering and Robotics, Tohoku University, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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