Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control
Yamato Fukuta*, Masashi Yanada**, Atsushi Ino**,
Yoshio Mita***, Yves-André Chapuis*, Satoshi Konishi**,
and Hiroyuki Fujita*
*Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
**Department of Mechanical Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577, Japan
***Department of Electrical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
We propose a microconveyor based on silicon microelectromechanical systems (MEMS) technology and demonstrate successful operation of the microconveyor. Microactuators work as air nozzles, which generate directed air flow by changing the pathways of compressed nitrogen gas. One-dimensional conveyance of an object 2.1mm × 4.1mm × 200μm weighing approximately 4mg is demonstrated with a directed air flow of 17kPa. Using a two-dimensional conveyor, we levitate and move an object 3mm × 3mm × 100μm weighing approximately 2mg using a continuous air flow. Conveyance toward the force equilibrium point was achieved with a regularly pulsed air flow. We are now studying full control of two-dimensional conveyance. We also propose control by actuating air nozzles to change the direction of air flow and move the equilibrium point to transfer the object to the desired point.
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