New Fabrication of Multiple-Layer Microcoil Using Anodic Oxidized Aluminum
Kenichi Muraki and Katsutoshi Kuribayashi
Yamaguchi University, 2-16-1 Tokiwadai, Ube, Yamaguchi 755-8611, Japan
A multiple-layer microcoil is a promising candidate for micromagnetic sensors for probing cracks in pipes in power stations and plants. We proposed fabrication of multiple-layer microcoils combining Al anodic oxidation and photolithography, and conducted experiments with the following results: 1) Sputter-deposited Al was anodically oxidized and thickness of Al2O3 formed controlled by anodic-oxidation time. 2) A pattern with Al and Al2O3 was made by masking Al with photoresist to prevent anodic oxidation. 3) A multiple-layer Al and Al2O3 was fabricated by combining Al anodic oxidation and photolithography. 4) As these results shown, multiple-layer microcoils having both high inductance and low resistance were fabricated as proposed using a simple process and having a high potential application to smaller multiple-layer microcoils.
Copyright© 1999 by Fuji Technology Press Ltd. and Japan Society of Mechanical Engineers. All right reserved.