Drive of a Piezoelectric Cycloid Motor in a High Frequency Range
Iwao Hayashi*, Nobuyuki Iwatsuki** and Koosuke Fujimoto***
* Faculty of Engineering, Tokyo Institute of Technology, 2-12-1 Ohokayama, Meguro-ku, Tokyo, 152 Japan
** Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 227 Japan
*** Research Center of Production Technology, Canon Inc., 3-30-2 Shimo-maruko, Ohta-ku, Tokyo, 146 Japan
A piezoelectric cycloid motor was proposed by the authors, and their experiments revealed that the rotational principle was effective and that the motor kept its rotational speed constant up to its maximum output torque. However, the maximum torque was small, and the rotational accuracy was poor. In this report, the motor is driven in a high frequency range including the motor’s resonance frequency to obtain improved characteristics. Because the driving amplitude of the stator is increased by resonance, the inertial effect of the stator is expected. As a result, the maximum output torque has been increased to six times, while the rotational accuracy has been much improved.