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JRM Vol.3 No.3 pp. 218-219
doi: 10.20965/jrm.1991.p0218
(1991)

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The Measurement of 2-Dimensional Micro-Pattern Using Laserbeam Scanning

Hiroo Fujita

Technical Research Laboratory, Citizen Watch Corp. 840 Shimotomi, Tokorozawa, Saitama 359, Japan

Received:
May 30, 1991
Accepted:
June 10, 1991
Published:
June 20, 1991
Creative Commons License
Abstract
Cite this article as:
H. Fujita, “The Measurement of 2-Dimensional Micro-Pattern Using Laserbeam Scanning,” J. Robot. Mechatron., Vol.3 No.3, pp. 218-219, 1991.
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