A Direction Sensing Technique of a Reference Point by Using Cross-Hair Diffraction Beam
Masafumi Ito*, Kazuhiro Hane*, Fumio Matsuda**, Yoshiki Uchikawa* and Shuzou Hattori***
* Faculty of Engineering, Nagoya University, Furocho, Chigusa-ku, Nagoya 464, Japan
** Gifu National College of Technology, Motosu-gun, Gifu 501-04, Japan
*** Nagoya Industrial Science Research Institute, Tenpaku-ku, Nagoya 468, Japan
We describe a technique for measuring the direction of a reference point easily and accurately. In the method, cross-hair diffraction beam, corner cube and an XYscanner driven by piezo stacks are used. The accuracy for angular detection was about 10p rad.