JRM Vol.3 No.1 pp. 41-46
doi: 10.20965/jrm.1991.p0041


Clean Room Actuators

Toshiro Higuchi

Institute of Industrial Science, University of Tokyo, 22-1 Roppongi 7-chome Minatoku Tokyo Japan

February 20, 1991
Clean rooms are becoming indispensable for production of semiconductors or biotechnology related activities. Demand for a higher degree of cleanness is increasing. A need for the development of automatic machinery which does not generate dust is becoming increasingly strong. This paper is intended to present the current situation concerning actuators for clean rooms, including research conducted by the author.
Cite this article as:
T. Higuchi, “Clean Room Actuators,” J. Robot. Mechatron., Vol.3 No.1, pp. 41-46, 1991.
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