single-rb.php

JRM Vol.3 No.1 pp. 41-46
doi: 10.20965/jrm.1991.p0041
(1991)

Paper:

Views over last 60 days: 193

Clean Room Actuators

Toshiro Higuchi

Institute of Industrial Science, University of Tokyo, 22-1 Roppongi 7-chome Minatoku Tokyo Japan

Published:
February 20, 1991
Creative Commons License
Abstract

Clean rooms are becoming indispensable for production of semiconductors or biotechnology related activities. Demand for a higher degree of cleanness is increasing. A need for the development of automatic machinery which does not generate dust is becoming increasingly strong. This paper is intended to present the current situation concerning actuators for clean rooms, including research conducted by the author.

Cite this article as:
Toshiro Higuchi, “Clean Room Actuators,” J. Robot. Mechatron., Vol.3, No.1, pp. 41-46, 1991.
Data files:

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 International License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Oct. 22, 2021