A Dual-Axis Liquid-Rate Microgyroscope Using Electro-Conjugate Fluid
Shinichi Yokota*, Yoshitsugu Ogawa*, Kenjiro Takemura**,
and Kazuya Edamura***
*Precision and Intelligence Lab., Tokyo Institute of Technology, R2-41, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
**Department of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
***New Technology Management Co., Ltd.
The dual-axis liquid-rate gyroscope using Electro-Conjugate Fluid (ECF) proposed here follows a previously proposed single-axis liquid-rate gyroscope using ECF , a dielectric “smart fluid” generating a powerful jet flow (ECF jet) under a strong Direct-Current (DC) electric field. Although the proposed gyroscope’s sensing principle is based on that of a conventional gas rate sensor [2-4], the gyroscope itself is much more sensitivity because its density is generally higher than that of a gas. The gyroscope is more suitable for a microsensor than a gas rate sensor having a pump with piezoelectric actuator because the proposed gyroscope’s pump consists of a pair of tiny electrodes. We fabricated a 40×40×21 mm3 dual-axis liquid-rate gyroscope prototype applying a single-axis liquid-rate microgyroscope and confirmed performance in experiments. Scale factors for the X and Y-axes measured in the gyroscope are -24 mV/°/s and -21 mV/°/s. Experimental results confirmed the dual-axis liquid-rate gyroscope potential.
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